Fabrication of high-performance devices using imprinting onto chalcogenide glasses

在低毒硫化物玻璃(Sb-Ge-Sn-S系)上，采用周期光栅热压印和铝金属热蒸发的方法制备了间距为500 nm的中红外线栅偏振器。压印后，铝以倾斜的角度沉积在光栅上，形成线栅偏振器。所制得的偏振片在5~9 nm波长处的TM透过率大于60%，消光比大于20dB。

A mid-infrared wire-grid polarizer with a 500-nm pitch was fabricated on a low toxic chalcogenide glass (Sb-Ge-Sn-S system) by the thermal imprinting of periodic grating followed by the thermal evaporation of Al metal. After imprinting, deposition of Al on the grating at oblique angle produced a wire-grid polarizer. The fabricated polarizer showed polarization with TM transmittance greater than 60% wavelengths and an extinction ratio greater than 20 dB at 5-9 um wavelengths.