Micromanipulation by flexible transformation of a droplet using the multi-needle-type capillary

近年来，需要用于生物细胞和组织或MEMS/NEMS器件的高自由度微操作方法，其尺寸小于亚毫米量级。本计画针对利用表面张力进行高自由度微操作之多针型毛细管进行开发与评估。首先，多针型毛细管的制作使用圆柱形排列的钨针，这是由微型直线步进电机上下移动。一个小的芯片寄存器可以保持，倾斜和旋转的液滴的表面张力，这是形成在毛细管尖端。其次，改变多针型毛细管，其针是圆锥形排列，制造控制毛细管力的表面张力。通过实验验证了毛细力随毛细尖端弯曲的变化规律。在此基础上，构建了基于多针型毛细管的装配作业系统。小的芯片寄存器可以在该系统中重新排列和组装。

Recently, high DOF micromanipulation methods for biological cells and tissues or MEMS/NEMS devices, whose sizes are smaller than a sub-millimeter order, are required. In this project, the multi-needle-type capillary for high DOF micromanipulation by surface tension is developed and evaluated. First, the multi-needle-type capillary was fabricated using cylindrically-arranged tungsten needles, which are moved up and down by micro linear stepping motors. A small chip register could be held, tilted and rotated by surface tension of the droplet, which was formed on the capillary tip. Next, altered multi-needle-type capillary, whose needles are conically arranged, was fabricated to control capillary force by surface tension. Variation of capillary forces by resizing the capillary tip could be verified in the experiments. Then, the assembly operation system using the multi-needle-type capillary was constructed. small chip registers could be rearranged and assembled in this system.