Building a Coincident Multi-Hit COLTRIMS Imaging Apparatus

我们项目的主要目标是在哈希姆大学物理系建立和运行一个巧合多命中COLTRIMS成像系统（冷目标反冲离子动量光谱）。这一技术以后将用于研究电子-原子和电子-分子碰撞动力学。目标是确定潜在的微观电子驱动过程。这些工艺对于微电子器件材料的等离子体处理、等离子体增强化学气相沉积（CVD）、废物储存库的稳定性等许多应用具有重要意义。使用COLTRIMS成像技术，可以几乎完全检测到所有碎片的矢量动量，具有相对较高的分辨率，用于电子-原子和电子-分子碰撞。因此，这些碰撞的各种特征可以深入研究，旨在定量理解许多电子动力学。

The primary goal of our project is to build up and operate a coincidence multi-hit COLTRIMS imaging system (COLd Target Recoil Ion Momentum Spectroscopy) in the physics department at the Hashemite university. This technique will be later employed to study the dynamics of the electron-atom and electron-molecule collisions. Goal is to identify the underlying microscopic electron driven processes. These processes are of immense importance for many applications such as plasma processing of materials for microelectronic devices, plasma-enhanced chemical vapor deposition (CVD), stability of waste repositories. Using the COLTRIMS imaging technique allows a nearly complete detection of the vector momenta of all fragments with comparatively high resolution for electron- atom and electron-molecule collisions. Thus the various features of these collisions can be in-depth investigated aiming at a quantitative understanding of the many electron dynamics.