Interferometer optimisation in RPM
Interferometer optimisation in RPM
批准号:
10022190
负责人:
金额:
$2.02万
依托单位:
依托单位国家:
英国
项目类别:
Collaborative R&D
财政年份:
2022
资助国家:
英国
项目状态:
已结题
起止时间:
2022 至 --
中文摘要
Infinitesima开发和生产快速探针显微镜(RPM)。它是一种非常高速的原子力显微镜(AFM),在半导体工业中具有特殊的应用。该系统的核心是对三个(x,y,z)轴的高灵敏度干涉闭环控制。高度(z轴)是最具挑战性的,也是最关键的。在这个项目中,我们将与来自国家物理实验室的世界级专家合作,探索是否有这部分系统的设计方面可以进一步优化,以不断提高该测量系统的性能。
英文摘要
Infinitesima develops and manufactures the Rapid Probe Microscope (RPM). It is a very high speed atomic force microscope (AFM) with particular application within the semiconductor industry. At the heart of the system is highly sensitive interferometric closed loop control over three (x,y,z) axes. The height (z axis) is the most challenging and also the most critical. Within this project we will explore, in collaboration with world class experts from NPL, if there are aspects of the design of this part of the system that can be further optimised to continuously improve the performance of this measurement system.
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