3D Nanofabrication and Nanocharacterisation facility

该项目旨在澳大利亚建立一个革命性的纳米级制造和表征设施。该设备是一种基于角度的纳米级蚀刻系统，具有集成的化学分析能力，将是澳大利亚同类仪器中的第一台。该设施将使以半导体、氧化物和金属为基础的3D纳米结构和新设备几何形状的制造和表征成为史无前例的，这些材料为创新能源、纳米光学和量子设备应用奠定了现代纳米电子的基础。这种独特的设备将促进纳米材料的突破性发现，并促进澳大利亚研究人员之间的合作，以加快先进纳米设备技术的行业。

This project aims to establish a revolutionary nanoscale fabrication and characterisation facility in Australia. The facility is an angle-based nanoscale etching system with integrated chemical analysis capabilities and will be the first instrument of its kind in Australia. The facility will enable unprecedented fabrication and characterisation of 3D nanostructures and new device geometries from semiconductors, oxides and metals that underpin modern nanoelectronics for innovative energy, nano-optical and quantum device applications. This unique equipment will facilitate breakthrough discoveries in nanomaterials, and foster collaborations amongst Australian researchers to accelerate industry in advanced nanodevice technologies.