Development of Smart NDIR CO2 Gas Detector Based on MEMS CMOS IR Source and Detector Technology of Capnography applications

剑桥CMOS传感器(CCS)是超低功耗、高温微热板器件的领先供应商之一，该器件可轻松集成到用于微处理器芯片的相同硅平台上，从而能够生产用于医疗、消费、工业和汽车应用的新一代微型传感器。通过与剑桥大学和大型跨国硅代工合作伙伴的合作，CCS通过开发和优化用于制造微电子机械系统(MEMS)组件的深反应离子刻蚀(DRIE)工艺，率先生产出这些微电热板。CCS技术的优势在于它使用标准的复合金属氧化物半导体(CMOS)硅晶片，非常适合大批量、低成本的应用。这些微热板器件具有多种用途，包括微型催化和阻性气体传感器、用于气体传感和光谱应用的宽带中红外发射器、流量传感器和带有片上控制电路的智能传感器。CCS基于微热板开发的首批产品之一是宽带中红外分光器。这些发射器被用于温室气体监测(如二氧化碳、甲烷、氮氧化物)的非色散红外(NDIR)气体测量应用，以及用于医疗应用(如二氧化碳监测)的人体呼气分析。此外，使用相同的平台技术，CCS还开发了高度创新的匹配宽带红外探测器，用于NDIR气体传感应用的发射器。在这个项目中，我们的目标是利用上述独特的技术优势，开发一种用于人体呼吸分析的最紧凑的二氧化碳(CO2)气体传感器，该传感器将专注于实现低成本的二氧化碳分析应用，而不会影响精度。

Cambridge CMOS Sensors (CCS) is one of the leading providers of ultra-low power, hightemperature micro-hotplate devices that is readily integrated on the same silicon platform usedfor microprocessor chips, thereby enabling the capabilities of producing a new generationminiature sensors for medical, consumer, industrial and automotive applications. Incollaboration with University of Cambridge, and large multi-national silicon foundry partners,CCS has pioneered the production of these micro-hotplates by developing and optimisingDeep Reactive Ion Etching (DRIE) process that is used for making Micro ElectromechanicalSystem (MEMS) components. The benefit of CCS technology is that it uses standardComplementary Metal Oxide Semiconductor (CMOS), silicon wafers, which is ideal for highvolume, low cost applications. These micro-hotplate devices have many uses, which includesminiature catalytic and resistive gas sensors, broadband mid-infrared emitter for gas sensingand spectroscopy applications, flow sensors, and smart sensors with on-chip control circuits.One of the first products developed by CCS based on micro-hotplates is the broadband midinfraredemitter. These emitters are being used for Non-Dispersive Infrared (NDIR) gassensing applications for greenhouse gas monitoring (such as carbon dioxide, methane,nitrogen oxide) as well as human breath analysis for medical applications (such as carbondioxide monitoring). Furthermore, using the same platform technology CCS has alsodeveloped highly innovative matching broadband IR detectors that are used with the emitterfor NDIR gas sensing application. In this project we aim to take advantage of the aboveunique technological advantages to develop one of the most compact carbon dioxide, (CO2)gas sensors for human breath analysis that will focus on enabling low cost capnographyapplications but without compromising on accuracy.