READ-OUT INSTRUMENTATION FOR X-RAY CONTACT MICROSCOPY

普林斯顿大学的软X射线激光器(波长18.2 nm，10-30毫微秒 脉冲)，可以在抗蚀剂上产生水中活细胞的图像。 与普林斯顿大学合作，PXL Inc.正在与 波长更短。获得激光具有现实的前景 作用在10 nm以下，降至1 nm。可行的生物医学使用需要方法 方便、准确地从X光曝光中提取信息 阻力：最终，横向和垂直分辨率-10纳米必须是 获得。目前的显微镜不太可能实现这些目标。这 该提案旨在将新型显微镜应用于读出问题。 在第一阶段，X射线激光产生的细胞图像将通过 Nomarski(NM)、扫描电子(SEM)、扫描隧道(STM)和原子 强制(AFM)显微镜建立最有效的方法 用用于读出光刻胶的AFM传感头来修改STM。 第二阶段的目标将是建造一个方便用户的仪器，基于 在STM和AFM头上，用于读出具有生物图像的抗蚀剂 细胞，精确度为-10 nm。在第二阶段的最后阶段，这 该仪器将应用于免疫系统和癌细胞。第二阶段 将生产该仪器的商业原型。

A soft X-ray laser at Princeton University (18.2 nm wavelength, 10-30 nsec pulses), can produce images of live cells in water on resist. Collaborating with Princeton University, PXL Inc. is developing lasers with shorter wavelengths. There are realistic prospects for obtaining laser action below 10 nm, down to 1 nm. Viable biomedical use requires methods to relieve information conveniently and accurately from X-ray exposed resists: eventually, lateral and vertical resolutions -10 nm must be obtained. Current microscopies are unlikely to achieve these goals. This proposal aims at applying novel microscopies to the read-out problem. In Phase I, images of cells produced by the X-ray laser will be examined by Nomarski (NM), scanning electron (SEM), scanning tunneling (STM) and atomic force (AFM) microscopies to establish the most effective methods of modifying the STM with an AFM sensing head for reading out photoresists. Goals of Phase II will be construction of a user-friendly instrument, based on STM and an AFM head, for read-out of resists with images of biological cells with accuracies of -10 nm. In the final stages of Phase II, this instrument will be applied to immune systems and cancer cells. Phase II will produce a commercial prototype of the instrument.