ELECTRON BEAM COLLIMATION FOR FIELD EMISSION DISPLAYS

我们建议开发具有集成聚焦透镜的场发射阵列，使平板场发射显示器能够实现高分辨率、高亮度、大动态范围和高对比度，这些都是数字x射线成像软拷贝所需的特性。具体方法是开发具有自对准集成透镜的场发射阵列的制造工艺，并通过实验证明，这些场发射阵列的电子束可以准直，从而可以显着改善荧光粉屏幕上的光斑尺寸。场发射显示器具有比阴极射线管更好的视觉品质，即高分辨率、各向同性调制传递函数、高亮度、大动态范围、高对比度和无闪烁图像，同时保持CRT的宽视角和良好的显色性。此外，场发射显示器又薄又平。电子束准直允许应用高压荧光粉，并在场发射体阵列和荧光粉屏幕之间实现更大的间隙。高压荧光粉具有更高的发光效率和更长的荧光粉寿命。它们不会污染磁场发射器。较大的间隙提供更好的真空，从而提高场发射极寿命。在第一阶段，我们开发了两种工艺来制造具有自对准集成透镜的场发射阵列。电子轨迹模拟结果表明，该透镜具有良好的光束准直性能。我们认为，采用集成透镜的场射阵列不仅可以提高分辨率，还可以提高图像质量和可靠性。建议的商业应用：平板显示器市场正在稳步增长，预计到2000年每年价值200 - 300亿美元。场发射显示器由于其相对于其他平板显示器具有更好的视觉和性能特征，因此可以占据很大一部分市场。集成透镜的场发射阵列也适用于许多电子枪应用。

We propose to develop field emitter arrays with integrated focusing lenses that will enable flat-panel field-emission displays to achieve high resolution, high luminance, large dynamic range and high contrast, properties required for softcopy of digital x-ray imaging. The specific approaches are to develop the fabrication process for field emitter arrays with self-aligned integrated lenses and to experimentally demonstrate that the electron beam from these field-emitter arrays can be collimated such that the spot size on the phosphor screen can be dramatically improved. Field emission displays can have better visual qualities than cathode ray tubes, i.e., high resolution, isotropic modulation transfer function, high luminance, large dynamic range, high contrast and flickerless images, and at the same time retain wide viewing angle and good color of the CRT. In addition, field-emission displays are thin and flat. Electron beam collimation allows the application of high voltage phosphors and implementation of a larger gap between the field emitter arrays and the phosphor screen. High voltage phosphors are more efficient and have higher luminance and longer phosphor lifetime. They do not contaminate the field emitters. A larger gap provides better vacuum and thus improves field emitter lifetime. In Phase I we developed two processes to fabricate field-emitter arrays with self-aligned integrated lenses. The electron trajectory simulations indicate that the lenses are capable of providing good beam collimation. We believe that the proposed field-emitter arrays with the integrated lenses can improve not only resolution, but also image quality and reliability. PROPOSED COMMERCIAL APPLICATIONS: The flat-panel display market is steadily growing and is predicted to be worth $20-$30 billion per year by the year 2000. Field emission displays could capture a large portion of the market because of their better visual and performance characteristics relative to other flat panel displays. Field- emitter arrays with integrated lenses are also applicable for many electron gun applications.