ELECTRON BEAM COLLIMATION FOR FIELD EMISSION DISPLAYS

我们建议开发集成聚焦透镜的场发射阵列，使平板场发射显示器能够实现数字X射线成像软拷贝所需的高分辨率、高亮度、大动态范围和高对比度。具体的方法是开发具有自对准集成透镜的场发射阵列的制造工艺，并在实验上证明来自这些场发射阵列的电子束可以被准直，从而可以显著改善荧光屏上的光斑尺寸。场发射显示器可以比阴极射线管具有更好的视觉质量，即高分辨率、各向同性调制传递函数、高亮度、大动态范围、高对比度和无闪烁图像，同时保持CRT的宽视角和良好的颜色。此外，场发射显示器又薄又平。电子束准直允许应用高压荧光粉，并在场发射极阵列和荧光屏之间实现更大的间隙。高压荧光粉效率更高，亮度更高，荧光粉寿命更长。它们不会污染场发射器。更大的间隙提供更好的真空，从而提高场发射极寿命。在第一阶段，我们开发了两种工艺来制备具有自对准集成透镜的场发射阵列。电子轨迹模拟表明，该透镜能够提供良好的光束准直。我们相信，所提出的集成透镜的场发射阵列不仅可以提高分辨率，而且可以提高图像质量和可靠性。拟议的商业应用：平板显示器市场正在稳步增长，预计到2000年每年的价值将达到200-300亿美元。与其他平板显示器相比，场发射显示器具有更好的视觉和性能特性，因此可以占据很大的市场份额。具有集成透镜的场发射极阵列也适用于许多电子枪应用。

We propose to develop field emitter arrays with integrated focusing lenses that will enable flat-panel field-emission displays to achieve high resolution, high luminance, large dynamic range and high contrast, properties required for softcopy of digital x-ray imaging. The specific approaches are to develop the fabrication process for field emitter arrays with self-aligned integrated lenses and to experimentally demonstrate that the electron beam from these field-emitter arrays can be collimated such that the spot size on the phosphor screen can be dramatically improved. Field emission displays can have better visual qualities than cathode ray tubes, i.e., high resolution, isotropic modulation transfer function, high luminance, large dynamic range, high contrast and flickerless images, and at the same time retain wide viewing angle and good color of the CRT. In addition, field-emission displays are thin and flat. Electron beam collimation allows the application of high voltage phosphors and implementation of a larger gap between the field emitter arrays and the phosphor screen. High voltage phosphors are more efficient and have higher luminance and longer phosphor lifetime. They do not contaminate the field emitters. A larger gap provides better vacuum and thus improves field emitter lifetime. In Phase I we developed two processes to fabricate field-emitter arrays with self-aligned integrated lenses. The electron trajectory simulations indicate that the lenses are capable of providing good beam collimation. We believe that the proposed field-emitter arrays with the integrated lenses can improve not only resolution, but also image quality and reliability. PROPOSED COMMERCIAL APPLICATIONS: The flat-panel display market is steadily growing and is predicted to be worth $20-$30 billion per year by the year 2000. Field emission displays could capture a large portion of the market because of their better visual and performance characteristics relative to other flat panel displays. Field- emitter arrays with integrated lenses are also applicable for many electron gun applications.