Using the Ionic Liquid Ion Sources for Focused Ion Beam applications: Investigating the fundamentals

镓液态金属离子源（LMIS）是离子束材料蚀刻的标准选择，有助于离子束光刻作为原位微加工的首选技术。许多微加工应用将受益于更灵活的离子束源，不同的离子束种类显著地影响铣削结果的物理和化学性质，例如通过使用化学反应性离子来减少离子注入或增强蚀刻。可以从离子液体中提取离子。通过使用离子液体，可以在更大的范围内发射更多的离子类型。最近，通过开发离子液体用于航天器的离子推进器，离子液体的操作有了很大的改进。我们在南安普顿的研究小组已经开发出一种用于微型航天器推进的电喷雾离子推进器。本计画将开发此推进器，作为聚焦离子束蚀刻材料的离子注入式蚀刻系统。博士将研究离子液体离子源离子发射的基本原理，使用各种诊断技术研究光束的特性，以及大卫费恩电推进实验室的优良设施。特别强调将深入了解离子发射过程，使用新型离子液体，以及离子发射源的成像。博士是EPSRC资助的大型项目的一部分，与光电研究中心合作（Oleg Buchnev博士）; https：gow.epsrc.ukri.org/NGBOViewGrant.aspx? GrantRef=EP/V04995 X/1博士学位由Thermo Fisher Scientific赞助，Thermo Fisher Scientific是聚焦离子束技术开发的世界领导者之一。该博士生将与他们的主要FIB研发团队密切合作。欲了解更多信息，请联系南安普顿大学宇航学讲师Charlie Ryan博士，c.n. ryan@soton.ac.uk。

Gallium Liquid Metal Ion Sources (LMIS) are the standard choice for ion beam material etching, facilitating ion beam lithography as the go-to technique for in situ microfabrication. Many microfabrication applications would benefit from a more flexible ion beam source, with different ion beam species significantly influencing the physical and chemical nature of the milling results, for example reducing ion implantation or enhancing etching through using chemically reactive ions.One such option is Ionic Liquid Ion Sources (ILIS), where rather than extracting ions from a liquid metal such as gallium, ions can be extracted from an ionic liquid. Through the use of Ionic Liquids, there is a far greater choice of ion type that can be emitted, across a much larger range.Recently there have been great improvement in the operation of ILIS's through the development of their use for ion thrusters for spacecraft. Our research group at Southampton has developed an electrospray ion thruster for micro spacecraft propulsion. This project will develop this thruster for application as an ILIS for Focused Ion Beam etching of materials. The PhD will investigate the fundamentals of ion emission from an Ionic Liquid Ion Source, investigating the properties of the beam using various diagnostic techniques, and the excellent facilities at the David Fearn Electric Propulsion Laboratory. Particular emphasis will be put on gaining insight into the ion emission process, the use of novel ion liquids, and the imaging of the ion emission source.The PhD is part of a large EPSRC funded project, in collaboration with the Optoelectronics Research Centre (Dr Oleg Buchnev);https://gow.epsrc.ukri.org/NGBOViewGrant.aspx?GrantRef=EP/V04995X/1 The PhD is part sponsored by Thermo Fisher Scientific, one of the world leaders in the development of focused ion beam technology. The PhD student will be working closely with their primary FIB R&D team.For more information please contact Dr Charlie Ryan, Lecturer in Astronautics, University of Southampton, c.n.ryan@soton.ac.uk.