Improved Probe Tips for Biomedical Atomic Force Microscopy via Batch Wafer-Scale

项目摘要/摘要 这项SBIR拨款用于完善和扩大一种新的专利制造工艺 用于制作生物标本图像的UltraSharp和硬探头提示。扫描探头 显微镜(SPM)方法，如原子力显微镜(AFM)，创建表面的图像 通过在表面上铺设一个探测器。探测器本身由一个尖端组成(它与 表面)和主体(其支撑尖端并提供外部可读信号)。 尖端曲率半径(ROC)确定可 通过成像，针尖成分确定其硬度，从而确定其耐磨性。 目前，还没有已知的批量工艺来制造既非常锋利(ROC)的尖端 &lt；5 nm)和硬质(&gt；15 Gpa)。伊利诺伊大学发明的一种新工艺解决了这些问题 有问题。这一过程包括两个步骤。首先，化学气相沉积(CVD)用于 用一种化学惰性、高导电性和极硬的材料涂在针尖上。第二, 场定向溅射锐化(FDSS)将探针尖端锐化到原子尺寸(1-4 nm 顶端的曲率半径)。 目前的项目将涉及进行研究，以确定这一过程是否可以 适用于生物样品的成像，通过在探头尖端涂上各种不粘涂层。 超硬、不粘着、导电且相对便宜的探头尖端 将显著提高所有使用原子力显微镜成像非导电材料的人的能力 生物样本，如病毒、DNA、细胞膜和其他细胞结构，其中 电荷积聚限制异物在探头尖端的效力和粘附性限制图像 决议。

Project Summary/Abstract This SBIR grant funds efforts to perfect and scale up a newly patented process for fabricating ultrasharp and hard probe tips for making images of biological specimens. Scanning probe microscopy (SPM) methods such as atomic force microscopy (AFM) create images of surfaces by rastering a probe across the surface. The probe itself consists of a tip (which interacts with the surface) and a body (which supports the tip and provides an externally-readable signal). The tip radius of curvature (ROC) determines the size of the smallest surface feature that may be imaged, and the tip composition establishes its hardness and thus its wear resistance. Currently, there is no known batch process to fabricate tips that are both extremely sharp (ROC < 5 nm) and hard (> 15 GPa). A new process invented at the University of Illinois solves these problems. The process involves two steps. First, chemical vapor deposition (CVD) is used to coat the tips with a chemically inert, highly conductive, and extremely hard material. Second, field directed sputter sharpening (FDSS) sharpens the probe tip to atomic dimensions (1- 4 nm radius of curvature at the tip apex). The current project will involve carrying out research to determine whether this process can be adapted for imaging biological samples, by applying various non-stick coatings to the probe tips. Probe tips that are ultrasharp, very hard, non-adherent, conductive, and relatively inexpensive will significantly enhance the capabilities of all those who use AFM to image non-conductive biological samples such as viruses, DNA, cell membranes and other cell structures, where static charge build-up limits efficacy and adhesion of foreign matter to the probe tip apex limits image resolution.