Alternate technology for miniature gyroscope

角速率测量陀螺仪有望成为继压力传感器和加速度计成功商业化之后，微机电系统（MEMS）技术最重要的传感应用。除光学陀螺仪外，所有传统的陀螺仪都是通过检测作用在旋转或防振动质量上的科里奥利加速度来工作的。这项技术在过去的二十年中已经成熟，现在可以从多个供应商处获得商用MEMS陀螺仪。不幸的是，这些微型陀螺仪的精密机械结构在受到高冲击或振动时仍然容易失效。振荡运动中的小粒子和防震质量体会到相同的科里奥利加速度。这些粒子可以是电子、气体分子、离子、喷墨液滴或来自电喷涂的带电液滴。使用这些移动的粒子来测量角速率，而不是振动防震质量，可以大大提高设备的可靠性和稳健性。

The gyroscope for angular rate measurement is expected to be the most significant sensory application of the Microelectromechanical Systems (MEMS) technology after the successful commercialization of pressure sensors and accelerometers. With the exception of optical gyroscopes, all traditional gyroscopes operate by detecting the Coriolis acceleration acting on a rotating or vibrating proof mass. This technology has matured in the last two decades and commercial MEMS gyroscopes are now available from multiple venders. Unfortunately the delicate mechanical structures of these miniature gyroscopes are still prone to fail when subjected to high shock or vibration. Small particles in oscillatory motions and a vibrating proof mass experience the same Coriolis acceleration. These particles could be electrons, gas molecules, ions, inkjet droplets or charged droplets from electro spraying. Using these moving particles to measure angular rate in place of a vibrating proof mass could greatly improve device reliability and robustness. The proposed 5-year research program will explore original techniques for angular rate measurement without using a fragile vibrating proof mass. Although this new technology will never replace the mature vibrating mass inertial sensing technology that produces very low-cost MEMS gyroscopes in volume, it can provide additional capabilities such as robustness and accuracy to supplement existing inertial sensor technology.