Fast fabrication of curved microlens array using DMD-based lithography
Fast fabrication of curved microlens array using DMD-based lithography
复制标题
使用基于 DMD 的光刻技术快速制造弯曲微透镜阵列
DOI：
10.1063/1.4941356
复制
发表时间：
2016-01
期刊：
影响因子：
1.6
通讯作者：
Zhong Kejun
中科院分区：
文献类型：
--
作者：
Zhang Zhimin;Gao Yiqing;Luo Ningning;Zhong Kejun
Curved microlens array is the core element of the biologically inspired artificial compound eye. Many existing fabrication processes remain expensive and complicated, which limits a broad range of application of the artificial compound eye. In this paper, we report a fast fabrication method for curved microlens array by using DMD-based maskless lithography. When a three-dimensional (3D) target curved profile is projected into a two-dimensional (2D) mask, arbitrary curved microlens array can be flexibly and efficiently obtained by utilizing DMD-based lithography. In order to verify the feasibility of this method, a curved PDMS microlens array with 90 micro lenslets has been fabricated. The physical and optical characteristics of the fabricated microlens array suggest that this method is potentially suitable for applications in artificial compound eye.
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