The role of dissolved oxygen in hot water during dissolving oxides and terminating silicon surfaces with hydrogen
The role of dissolved oxygen in hot water during dissolving oxides and terminating silicon surfaces with hydrogen
复制标题
热水中溶解氧在溶解氧化物和用氢终止硅表面过程中的作用
DOI:
10.1016/0039-6028(94)00805-1
复制
发表时间:
1995
期刊:
影响因子:
1.9
通讯作者:
Y. Sugita
中科院分区:
文献类型:
--
作者:
S. Watanabe;Y. Sugita
影响因子:
4
作者:
HIGASHI, GS;CHABAL, YJ;RAGHAVACHARI, K
通讯作者:
RAGHAVACHARI, K
DOI:
10.1116/1.575980
发表时间:
1989-05-01
期刊:
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
影响因子:
--
作者:
CHABAL, YJ;HIGASHI, GS;BURROWS, VA
通讯作者:
BURROWS, VA