Fabrication of Three-Dimensionally Structured Titanium Oxide Thin Films by Transfer Printing

Fabrication of Three-Dimensionally Structured Titanium Oxide Thin Films by Transfer Printing
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转印法制备三维结构氧化钛薄膜

DOI:
10.1111/j.1551-2916.2011.04866.x
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发表时间:
2012
影响因子:
3.9
通讯作者:
I. Leu
I. Leu
中科院分区:
材料科学2区
文献类型:
--
作者:
Jian;S. Tsai;Wen;M. Hon;I. Leu

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在自组装单层(SAM)Au预涂衬底(诸如Si晶片、非平面玻璃和柔性塑料)介导的各种衬底上制造三维结构的金属氧化物对于电子学、光子学和生物技术中的许多实际应用是重要的。在这份报告中,我们描述了使用转印形成三维结构的TiO 2薄膜的特征尺寸为10 μm的直径和3 μm的高度在几平方毫米的面积上通过直接图案化到Si表面。这个过程是介导的3-巯丙基三甲氧基硅烷单层的存在下,引导转移的三维结构的二氧化钛薄膜从模具的低能量表面的Si基板通过表面力。
The fabrication of a three-dimensionally structured metal oxide on various substrates mediated with self-assemble monolayer (SAM) Au-precoated substrates, such as Si wafer, non-planar glass, and flexible plastic, is important for a number of practical applications in electronics, photonics, and biotechnology. In this report, we describe the use of transfer printing for forming three-dimensionally structured TiO2 thin films with feature sizes of 10 μm in the diameter and 3 μm in height over areas of several square millimeters by direct patterning onto Si surfaces. This process is mediated by the presence of a 3-mercaptopropyltrimethoxysilane monolayer that guides the transfer of three-dimensionally structured TiO2 thin films from the low-energy surfaces of the mold to a Si substrate via surface forces.
DOI: 10.1021/ac025700w
发表时间: 2002-08-15
影响因子: 7.4
作者:
Hu, SW;Ren, XQ;Allbritton, N
通讯作者: Allbritton, N
DOI: 10.1021/la049974l
发表时间: 2004-06-22
期刊: LANGMUIR
影响因子: 3.9
作者:
Hu, SW;Ren, XQ;Allbritton, NL
通讯作者: Allbritton, NL