Micro-macro hybrid soft-lithography master (MMHSM) fabrication for lab-on-a-chip applications.
Micro-macro hybrid soft-lithography master (MMHSM) fabrication for lab-on-a-chip applications.
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DOI：
10.1007/s10544-009-9390-9
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发表时间：
2010-04
影响因子：
2.8
通讯作者：
Han A
中科院分区：
文献类型：
--
作者：
Park J;Li J;Han A
我们提出了一种新颖的微宏观混合软光刻母版（MMHSM）制造技术，其中具有微观尺度和宏观尺度特征的微型器件可以通过单个软光刻步骤复制。首先通过台式铣床制造出具有宏观结构的聚（甲基丙烯酸甲酯）（PMMA）母模。然后通过热压印工艺将具有微米级结构的压印母模压印在PMMA表面上，得到PMMA母模。然后通过标准软光刻工艺从该 PMMA 母版复制聚（二甲基硅氧烷）（PDMS）母版。该工艺允许微观尺度（高度：3-20μm，宽度：20-500μm）和宏观尺度（高度：3.5mm，宽度：1.2-7mm）结构在PDMS母模上共存，最终的PDMS器件可以很容易地大量冲压出来。需要宏观高度尺寸的微流体结构，例如储液器或流体管互连件，可以直接构建到 PDMS 微流体装置中，而无需通常使用的手动冲压过程。这显着减少了此类手动制造步骤所需的对准误差和时间。在本文中，我们通过制造具有 40 个内置流体接口的 PDMS 微流体装置和 PDMS 多室神经元共培养平台，成功证明了这种新型混合制造方法的实用性，其中毫米级室通过 20 μm 宽和 200 μm 长的微流体通道阵列连接。使用扫描电子显微镜和光学轮廓测定法对所得结构的转移图案尺寸的完整性和表面粗糙度进行表征。
We present a novel micro-macro hybrid soft-lithography master (MMHSM) fabrication technique where microdevices having both microscale and macroscale features can be replicated with a single soft-lithography step. A poly(methyl methacrylate) (PMMA) master having macroscale structures was first created by a bench-top milling machine. An imprinting master mold having micro-scale structures was then imprinted on the PMMA surface through a hot-embossing process to obtain a PMMA master mold. A poly(dimethylsiloxane) (PDMS) master was then replicated from this PMMA master through a standard soft-lithography process. This process allowed both microscale (height: 3–20 μm, width: 20–500 μm) and macroscale (height: 3.5 mm, width: 1.2–7 mm) structures to co-exist on the PDMS master mold, from which final PDMS devices could be easily stamped out in large quantities. Microfluidic structures requiring macroscale dimensions in height, such as reservoirs or fluidic tubing interconnects, could be directly built into PDMS microfluidic devices without the typically used manual punching process. This significantly reduced alignment errors and time required for such manual fabrication steps. In this paper, we successfully demonstrated the utility of this novel hybrid fabrication method by fabricating a PDMS microfluidic device with 40 built-in fluidic interfaces and a PDMS multi-compartment neuron co-culture platform, where millimeter-scale compartments are connected via arrays of 20 μm wide and 200 μm long microfluidic channels. The resulting structures were characterized for the integrity of the transferred pattern sizes and the surface roughness using scanning electron microscopy and optical profilometry.
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影响因子：
2.7
作者：
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通讯作者：
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影响因子：
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通讯作者：
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作者：
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通讯作者：
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