Capacitive micromachined ultrasonic transducers for medical imaging and therapy.
Capacitive micromachined ultrasonic transducers for medical imaging and therapy.
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DOI：
10.1088/0960-1317/21/5/054004
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发表时间：
2011-05
期刊：
影响因子：
--
通讯作者：
Oralkan O
中科院分区：
文献类型：
--
作者：
Khuri-Yakub BT;Oralkan O
电容式微机械超声换能器(CMUT)在过去的二十年里得到了广泛的研究。虽然它们最初是为空气耦合应用而开发的，但今天它们的主要应用领域是医学成像和治疗。本文首先简要介绍了CMUT的基本结构和工作原理。讨论了我们开发几代制造工艺的进展，并强调了每种工艺的优缺点。综述了集成CMUT和支持集成电路的单片式和混合式方法。描述了我们开发的几个集成前端电子电路的原型换能器阵列，以及它们在二维和三维、解剖和功能成像以及消融治疗中的应用。这些结果证明了CMUT作为一种MEMS技术在许多医疗诊断和治疗中的应用。
Capacitive micromachined ultrasonic transducers (CMUTs) have been subject to extensive research for the last two decades. Although they were initially developed for air-coupled applications, today their main application space is medical imaging and therapy. This paper first presents a brief description of CMUTs, their basic structure, and operating principles. Our progression of developing several generations of fabrication processes is discussed with an emphasis on the advantages and disadvantages of each process. Monolithic and hybrid approaches for integrating CMUTs with supporting integrated circuits are surveyed. Several prototype transducer arrays with integrated frontend electronic circuits we developed and their use for 2-D and 3-D, anatomical and functional imaging, and ablative therapies are described. The presented results prove the CMUT as a MEMS technology for many medical diagnostic and therapeutic applications.
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DOI：
10.1109/jmems.2010.2076786
发表时间：
2010-12-01
期刊：
Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems
影响因子：
--
作者：
Lin DS;Zhuang X;Wong SH;Kupnik M;Khuri-Yakub BT
通讯作者：
Khuri-Yakub BT
DOI：
10.1109/tuffc.2007.256
发表时间：
2007-02-01
影响因子：
3.6
作者：
Bayram, Baris;Kupnik, Mario;Khuri-Yakub, Butrus T.
通讯作者：
Khuri-Yakub, Butrus T.
影响因子：
2.3
作者：
Cianci, E;Foglietti, V;Pappalardo, M
通讯作者：
Pappalardo, M
DOI：
10.1109/tuffc.2005.1563260
发表时间：
2005-12-01
影响因子：
3.6
作者：
Lohfink, A;Eccardt, PC
通讯作者：
Eccardt, PC
DOI：
10.1109/58.985700
发表时间：
2002-02-01
影响因子：
3.6
作者：
Caronti, A;Caliano, G;Pappalardo, M
通讯作者：
Pappalardo, M