Resonant Magnetic Field Sensors Based On MEMS Technology.
Resonant Magnetic Field Sensors Based On MEMS Technology.
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DOI：
10.3390/s91007785
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发表时间：
2009
期刊：
影响因子：
--
通讯作者：
Manjarrez E
中科院分区：
文献类型：
--
作者：
Herrera-May AL;Aguilera-Cortés LA;García-Ramírez PJ;Manjarrez E
微机电系统（MEMS）技术允许将磁场传感器与电子元件集成，其呈现出诸如小尺寸、轻重量、最小功耗、低成本、更好的灵敏度和高分辨率的重要优点。本文对基于MEMS技术的谐振式磁场传感器进行了讨论和评述。在实践中，这些传感器利用洛伦兹力，以便通过谐振结构的位移来检测外部磁场，这些谐振结构的位移是用光学、电容和压阻感测技术来测量的。由此，光学感测呈现出对电磁干扰（EMI）的抗扰性，并且降低了读出电子复杂性。此外，压阻感测需要简单的制造工艺以及标准封装。被认为是每个传感器的操作机制，优点和缺点的描述。MEMS磁场传感器是众多应用的潜在替代方案，包括汽车工业、军事、医疗、电信、海洋学、空间和环境科学。此外，未来的市场将需要在单个芯片上开发多个传感器，用于测量不同的参数，如磁场、压力、温度和加速度。
Microelectromechanical systems (MEMS) technology allows the integration of magnetic field sensors with electronic components, which presents important advantages such as small size, light weight, minimum power consumption, low cost, better sensitivity and high resolution. We present a discussion and review of resonant magnetic field sensors based on MEMS technology. In practice, these sensors exploit the Lorentz force in order to detect external magnetic fields through the displacement of resonant structures, which are measured with optical, capacitive, and piezoresistive sensing techniques. From these, the optical sensing presents immunity to electromagnetic interference (EMI) and reduces the read-out electronic complexity. Moreover, piezoresistive sensing requires an easy fabrication process as well as a standard packaging. A description of the operation mechanisms, advantages and drawbacks of each sensor is considered. MEMS magnetic field sensors are a potential alternative for numerous applications, including the automotive industry, military, medical, telecommunications, oceanographic, spatial, and environment science. In addition, future markets will need the development of several sensors on a single chip for measuring different parameters such as the magnetic field, pressure, temperature and acceleration.
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影响因子：
4.6
作者：
Kadar, Z;Bossche, A;Mollinger, JR
通讯作者：
Mollinger, JR
影响因子：
3.6
作者：
Gallop, J
通讯作者：
Gallop, J
影响因子：
3.6
作者：
Josephs-Franks, P;Hao, L;Macfarlane, JC
通讯作者：
Macfarlane, JC
影响因子：
2.3
作者：
Bao, MH;Yang, H;Sun, YC
通讯作者：
Sun, YC
DOI：
10.3390/s8042886
发表时间：
2008-04-28
期刊：
Sensors (Basel, Switzerland)
影响因子：
--
作者：
Chang H;Xue L;Qin W;Yuan G;Yuan W
通讯作者：
Yuan W