Three-dimensional profilometry with mixed binary defocusing technique
Three-dimensional profilometry with mixed binary defocusing technique
复制标题
混合二元散焦技术的三维轮廓测量
DOI：
10.1117/1.oe.55.10.104106
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发表时间：
2016-10
影响因子：
1.3
通讯作者：
Song Zhan
中科院分区：
文献类型：
--
作者：
Tang Suming;Zhang Xu;Tu Dawei;Song Zhan
抽象的。现有的二值散焦技术在测量速度上有很好的表现，但测量精度不高。本文提出了一种混合二进制散焦方法，它结合了一维调制散焦技术和二维调制散焦技术各自的优点。混合二值散焦法利用了这两种方法的频变特性来逼近正弦条纹图。选择优化的脉宽调制技术产生高频二值模式，选择改进的误差扩散抖动技术产生低频模式。然后采用相移法从散焦后的相位图中提取出包裹相位，再利用多波长相位展开法从不同频率下的包裹相位中提取出绝对相位。以包裹相位的均方根误差为标准，对不同的离焦方法进行了仿真比较。在真实的物体测量中比较测量表面。实验结果验证了这两种方法的频率依赖性，并且该方法比任何一种二元散焦方法都具有更好的性能。
Abstract. The existing binary defocusing techniques have excellent performance in the measurement speed, while the measurement precision is not high. We propose a mixed binary defocusing method, which combines the respective advantage of one-dimensional modulation defocusing techniques and two-dimensional modulation defocusing techniques. The mixed binary defocusing method adopts the frequency-dependent property of these two kinds of methods to approach the sinusoidal fringe patterns. The optimized pulse width modulation technique is selected to produce high-frequency binary patterns, and the improved error diffusion dithering technique is selected to generate low-frequency patterns. Then the phase-shifting method is adopted to obtain the wrapped phase from the defocused pattern, and the absolute phase is obtained with a multiple-wavelength phase unwrapping method from these wrapped phases at different frequencies. With the standard of the root mean square error of the wrapped phase, different defocusing methods are compared in the simulation. The measurement surfaces are compared in the real object measurement. The results verify the frequency-dependent property of these two kinds of methods and the proposed method has a greater performance than any one binary defocusing technique.
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