Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film.
Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film.
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基于 AlN 薄膜的高频压电微机械超声波换能器的设计和制造。
DOI：
10.3390/mi13081317
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发表时间：
2022-08-14
期刊：
影响因子：
3.4
通讯作者：
中科院分区：
文献类型：
--
作者：
压电微机械超声换能器（PMUT）是一种能够发射和接收超声波的微机电系统（MEMS）器件。由于其高频超声具有方向性好和分辨率高的优点，PMUT可用于低电源的应用场景，如指纹识别，无损检测和医疗诊断。在这里，基于氮化铝薄膜材料的PMUT的设计和制造。首先，利用多物理场耦合仿真软件对PMUT的固有频率进行了研究，确定了固有频率与振动层参数之间的关系。通过仿真得到了PMUT的传输性能。根据设计的简单MEMS加工工艺制作了PMUT器件。通过扫描电子显微镜确定PMUT振动层的形貌，并且PMUT装置的谐振频率为7.43 MHz。通过LCR测试仪测得的机电耦合系数为2.21%。
A piezoelectric micromachined ultrasonic transducer (PMUT) is a microelectromechanical system (MEMS) device that can transmit and receive ultrasonic waves. Given its advantages of high-frequency ultrasound with good directionality and high resolution, PMUT can be used in application scenarios with low power supply, such as fingerprint recognition, nondestructive testing, and medical diagnosis. Here, a PMUT based on an aluminum nitride thin-film material is designed and fabricated. First, the eigenfrequencies of the PMUT are studied with multiphysics coupling simulation software, and the relationship between eigenfrequencies and vibration layer parameters is determined. The transmission performance of the PMUT is obtained via simulation. The PMUT device is fabricated in accordance with the designed simple MEMS processing process. The topography of the PMUT vibration layer is determined via scanning electron microscopy, and the resonant frequency of the PMUT device is 7.43 MHz. The electromechanical coupling coefficient is 2.21% via an LCR tester.
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