Geometric analysis of measurement errors in a surface metrology class with closed-loop probes
Geometric analysis of measurement errors in a surface metrology class with closed-loop probes
复制标题
使用闭环探头对表面计量类中的测量误差进行几何分析
DOI：
10.1016/j.measurement.2021.109869
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发表时间：
2021-11
期刊：
影响因子：
5.6
通讯作者：
Ju Bingfeng
中科院分区：
文献类型：
--
作者：
Hu Yaoyuan;Zhao Ran;Ju Bingfeng
提出了一种新的闭环曲面测量误差模型。在这些表面测量系统中，探头尖端的运动被严格限制在一个平行的表面上，该表面与被测样品的恒定位移表面分开，由闭环控制器控制。这种计量系统的例子包括恒定信号模式扫描探针显微镜和坐标测量机。利用基于多体系统理论和曲面几何的误差模型，分析了体积误差和曲面跟踪控制器对最终测量误差的综合影响。以典型的大型扫描隧道显微系统为例，对其误差进行了全面的综述。仿真结果说明了系统误差对最终精度的影响。实验还对一个典型微结构表面进行了测量，以验证所提出的误差模型并建立可能的补偿方案。
This paper presents a novel measurement error model for closed-loop surface metrology. In these surface metrology systems, the motion of the probe tip is strictly constrained on a parallel surface that is separated from the measured sample surface of constant displacement by closed-loop controllers. Examples of such metrology systems include constant signal mode scanning probe microscopes and coordinate measuring machines. The combined effect of volumetric errors and surface tracking controllers on the final measurement error was analyzed using an error model developed based on multi-body system theory and surface geometry. A comprehensive overview of the errors of a typical large-scale scanning tunneling microscopy system is provided as an example. Simulations were performed to illustrate the influence of the systematic errors on the final accuracy. Experiments were also conducted on the measurement of a typical micro-structured surface to both verify the proposed error model and establish a possible compensation scheme.
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DOI：
10.1119/1.17525
发表时间：
1993-05
期刊：
--
影响因子：
--
作者：
S. Edition;C. J. Chen
通讯作者：
S. Edition;C. J. Chen
影响因子：
2.4
作者：
Klapetek, P.;Necas, D.;Koenders, L.
通讯作者：
Koenders, L.
DOI：
10.1109/34.121791
发表时间：
1992-02-01
影响因子：
23.6
作者：
BESL, PJ;MCKAY, ND
通讯作者：
MCKAY, ND
DOI：
10.1088/1757-899x/971/4/042052
发表时间：
2020-12
期刊：
IOP Conference Series: Materials Science and Engineering
影响因子：
--
作者：
M. Bahrami
通讯作者：
M. Bahrami
影响因子：
3.8
作者：
K. Desnijder;P. Hanselaer;Y. Meuret
通讯作者：
K. Desnijder;P. Hanselaer;Y. Meuret