Surface states of wet chemically etched n-Si(1 1 1):H surfaces
Surface states of wet chemically etched n-Si(1 1 1):H surfaces
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湿法化学蚀刻的n-Si(1 1 1):H表面的表面状态
DOI:
10.1016/j.electacta.2012.10.138
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发表时间:
2013
影响因子:
6.6
通讯作者:
W. Schindler
中科院分区:
文献类型:
--
作者:
S. Jakob;W. Schindler
Impedance measurements at wet chemically etched n-Si(111):H surfaces in contact with the aqueous electrolyte 0.1M H2SO4reveal a surface state related capacitance extending over a potential range of 350mV in the n-Si(111):H band gap. A detailed analysis of the impedance data allows to identify three different surface state energy levels contributing to the observed surface state capacitance. These energy levels coincide with electronic states of hydrogen interdiffused into the n-Si(111):H subsurface region, which occurs, for example, during the wet chemical preparation of n-Si(111):H surfaces. The density of the observed states in the n-Si(111):H subsurface region is of the order of (1014–1015)cm−3.
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