Reaching silicon-based NEMS performances with 3D printed nanomechanical resonators.
Reaching silicon-based NEMS performances with 3D printed nanomechanical resonators.
复制标题
利用3D打印纳米机械谐振器实现硅基NEMS性能。
DOI：
10.1038/s41467-021-26353-1
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发表时间：
2021-10-19
影响因子：
16.6
通讯作者：
Ricciardi C
中科院分区：
文献类型：
--
作者：
Stassi S;Cooperstein I;Tortello M;Pirri CF;Magdassi S;Ricciardi C
NEMS谐振器的极端小型化提供了在高性能质量检测中达到前所未有的分辨率的可能性。这些非常低的检测极限与两个因素的组合有关：小谐振器质量和高品质因数。NEMS的主要缺点是高度复杂、多步骤和昂贵的制造工艺。已经开发了几种替代制造工艺，但它们仍然限于MEMS范围和非常低的品质因数。在这里，我们报告了通过3D打印方法制造具有高品质因数的刚性NEMS谐振器。经过一个热步骤，我们达到了复杂的几何形状的印刷设备组成的陶瓷结构，具有高杨氏模量和低阻尼，表现出与硅基NEMS谐振器的性能。我们证明了快速制造NEMS器件的可能性，该器件是半导体谐振器作为高灵敏度质量和力传感器的有效替代品。NEMS器件，纳米机电系统，凭借其微小的尺寸，提供超高的灵敏度，但以制造复杂性为代价。在这里，Stassi等人成功地使用高分辨率3D打印制造了高品质因数NEMS设备。
The extreme miniaturization in NEMS resonators offers the possibility to reach an unprecedented resolution in high-performance mass sensing. These very low limits of detection are related to the combination of two factors: a small resonator mass and a high quality factor. The main drawback of NEMS is represented by the highly complex, multi-steps, and expensive fabrication processes. Several alternatives fabrication processes have been exploited, but they are still limited to MEMS range and very low-quality factor. Here we report the fabrication of rigid NEMS resonators with high-quality factors by a 3D printing approach. After a thermal step, we reach complex geometry printed devices composed of ceramic structures with high Young’s modulus and low damping showing performances in line with silicon-based NEMS resonators ones. We demonstrate the possibility of rapid fabrication of NEMS devices that present an effective alternative to semiconducting resonators as highly sensitive mass and force sensors. NEMS devices, nano-electro-mechanical systems, by virtue of their minute size, offer ultra-high sensitivity, though at the expense of manufacturing complexity. Here, Stassi et al succeed in manufacturing high quality factor NEMS devices using high resolution 3D printing.
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影响因子：
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