Polycarbonate Masters for Soft Lithography.
Polycarbonate Masters for Soft Lithography.
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DOI：
10.3390/mi12111392
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发表时间：
2021-11-13
期刊：
影响因子：
3.4
通讯作者：
Papautsky I
中科院分区：
文献类型：
--
作者：
Amadeo F;Mukherjee P;Gao H;Zhou J;Papautsky I
利用软光刻技术制造微流体器件是目前最流行的方法，因为它简单且成本低。该方法依赖于将弹性体（如聚二甲基硅氧烷（PDMS））浇铸在由硅衬底上的光刻胶制成的母片上。然而，这些大师可能是昂贵的，复杂的制造，易碎。在这里，我们描述了一种优化的复制模塑方法，通过在PDMS模具上热成型聚碳酸酯（PC）片材来保存原始主人。该过程比以前报道的方法更快、更简单，并且不会导致特征的分辨率或宽高比的损失。生成的PC母板被用于成功复制各种微流体装置，包括宽高比为0.025至7.3的矩形通道、大面积螺旋通道和间距为5µm的微柱阵列。此外，制造圆角特征，如半球形微孔，是可能的和容易的。对复制特征的定量分析显示变异率<2%。该方法成本低，不需要洁净室设置或危险化学品，并且快速简单。制造出来的主节点是刚性的，可以在无数个复制周期中存活下来。此外，损坏或丢失的母版可以很容易地由先前铸造的PDMS复制品代替。所有这些优点使得PC主机非常适合长期保存微流控设备的软光刻主机。
Fabrication of microfluidic devices by soft lithography is by far the most popular approach due to its simplicity and low cost. The approach relies on casting of elastomers, such as polydimethylsiloxane (PDMS), on masters fabricated from photoresists on silicon substrates. These masters, however, can be expensive, complicated to fabricate, and fragile. Here we describe an optimized replica molding approach to preserve the original masters by heat molding of polycarbonate (PC) sheets on PDMS molds. The process is faster and simpler than previously reported methods and does not result in a loss of resolution or aspect ratio for the features. The generated PC masters were used to successfully replicate a wide range of microfluidic devices, including rectangular channels with aspect ratios from 0.025 to 7.3, large area spiral channels, and micropost arrays with 5 µm spacing. Moreover, fabrication of rounded features, such as semi-spherical microwells, was possible and easy. Quantitative analysis of the replicated features showed variability of <2%. The approach is low cost, does not require cleanroom setting or hazardous chemicals, and is rapid and simple. The fabricated masters are rigid and survive numerous replication cycles. Moreover, damaged or missing masters can be easily replaced by reproduction from previously cast PDMS replicas. All of these advantages make the PC masters highly desirable for long-term preservation of soft lithography masters for microfluidic devices.
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影响因子：
6.1
作者：
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通讯作者：
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影响因子：
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通讯作者：
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