Vibration of Mechanically-Assembled 3D Microstructures Formed by Compressive Buckling.

Vibration of Mechanically-Assembled 3D Microstructures Formed by Compressive Buckling.
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DOI:
10.1016/j.jmps.2017.12.002
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发表时间:
2018-03
影响因子:
5.3
通讯作者:
Huang Y
Huang Y
中科院分区:
工程技术2区
文献类型:
--
作者:
Wang H;Ning X;Li H;Luan H;Xue Y;Yu X;Fan Z;Li L;Rogers JA;Zhang Y;Huang Y

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依赖于结构振动的微机电系统(MEMS)具有许多重要的应用,从振荡器和致动器到用于测量机械特性的能量采集器和车辆。然而,常规MEMS大多利用二维(2D)振动模式,从而施加了在3D设计中不存在的某些限制(例如,多方向能量收集)。通过受控压缩屈曲技术组装的3D振动微平台是有希望的,因为它们复杂的3D结构和调节它们的振动行为的能力(例如,固有频率和模式)通过使它们的柔软的弹性体基底变形而可逆地改变它们的尺寸。清楚地了解这种应变相关的振动行为是必不可少的,他们的实际应用。在这里,我们提出了一个研究的线性和非线性振动的三维介观结构,通过分析建模,有限元分析(FEA)和实验。得到了屈曲带的振动模态和线性固有频率的解析解,表明模态随静挠度幅值的增大而变化。该模型还产生了线性固有频率的比例律,可以扩展到一般的,复杂的3D几何形状,通过有限元分析和实验验证。在非线性振动区域,有限元分析表明,增加外载荷的幅值是提高带宽的有效手段。结果还揭示了减少的非线性振动的静态挠度振幅的三维结构的增加。开发的分析模型可用于开发新的3D振动微平台,例如,以实现同时测量不同的机械性能(密度,模量,粘度等)。薄膜和生物材料。
Micro-electromechanical systems (MEMS) that rely on structural vibrations have many important applications, ranging from oscillators and actuators, to energy harvesters and vehicles for measurement of mechanical properties. Conventional MEMS, however, mostly utilize two-dimensional (2D) vibrational modes, thereby imposing certain limitations that are not present in 3D designs (e.g., multi-directional energy harvesting). 3D vibrational microplatforms assembled through the techniques of controlled compressive buckling are promising because of their complex 3D architectures and the ability to tune their vibrational behaviour (e.g., natural frequencies and modes) by reversibly changing their dimensions by deforming their soft, elastomeric substrates. A clear understanding of such strain-dependent vibration behaviour is essential for their practical applications. Here, we present a study on the linear and nonlinear vibration of such 3D mesostructures through analytical modeling, finite element analysis (FEA) and experiment. An analytical solution is obtained for the vibration mode and linear natural frequency of a buckled ribbon, indicating a mode change as the static deflection amplitude increases. The model also yields a scaling law for linear natural frequency that can be extended to general, complex 3D geometries, as validated by FEA and experiment. In the regime of nonlinear vibration, FEA suggests that an increase of amplitude of external loading represents an effective means to enhance the bandwidth. The results also uncover a reduced nonlinearity of vibration as the static deflection amplitude of the 3D structures increases. The developed analytical model can be used in the development of new 3D vibrational microplatforms, for example, to enable simultaneous measurement of diverse mechanical properties (density, modulus, viscosity etc.) of thin films and biomaterials.
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