Long delay time study of thermal transport and thermal stress in thin Pt film-glass substrate system by time-domain thermoreflectance measurements
Long delay time study of thermal transport and thermal stress in thin Pt film-glass substrate system by time-domain thermoreflectance measurements
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通过时域热反射测量研究薄 Pt 薄膜-玻璃基板系统中的热传输和热应力的长延迟时间研究
DOI：
10.1016/j.applthermaleng.2016.08.110
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发表时间：
2017-01
影响因子：
6.4
通讯作者：
Takata Yasuyuki
中科院分区：
文献类型：
--
作者：
Yan Shen;Dong Cheng;Miao Tingting;Wang Wei;Ma Weigang;Zhang Xing;Kohno Masamichi;Takata Yasuyuki
固态热电装置对于各种可持续应用是期望的。这些薄膜器件中的大多数是多层结构，这需要对热传输和热应力有透彻的了解，以便解决热问题。本文发展了四种不同照明方式下的长延迟泵浦探测实验技术和理论模型，对薄膜、衬底和界面的热输运和热应力进行了综合表征。此外，94 nm厚的Pt膜玻璃衬底系统已被研究应用时域热反射测量下的四个照明配置与高信号质量。所得到的随时间变化的温度信号是由多层热输运和热应力的影响自发叠加而成的，相应的理论预测在整个延迟时间范围内与实验数据吻合较好。所测得的Pt膜的热导率显示出明显的尺寸效应。
Solid state thermoelectric devices are desirable for various sustainable applications. Most of these thin film devices are multilayered structures which requires thorough understanding of thermal transport and thermal stress in order to solve thermal issues. In this paper the experimental technology as well as theoretical model of long delay time pump-probe study with four different illumination configurations have been developed to comprehensively characterize the thermal transport and thermal stress of thin film, substrate and the interface. Furthermore, 94-nm-thick Pt film-glass substrate system has been studied by applying time-domain thermoreflectance measurements under four illumination configurations with high signal quality. The obtained time-dependent temperature signal is superposed by the effects of multilayered thermal transport and thermal stress spontaneously, and the corresponding theoretical predictions match well with the experimental data in the whole delay time range. The determined thermal conductivity of the Pt film shows significant size effect.
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DOI：
10.1116/1.1354600
发表时间：
2001-05
期刊：
Journal of Vacuum Science and Technology
影响因子：
--
作者：
H. Zou;D. Rowe;G. Min
通讯作者：
H. Zou;D. Rowe;G. Min
皮秒激光瞬态热反射法研究多晶钼纳米薄膜的跨面热传输
影响因子：
--
作者：
Miao Tingting;Ma Weigang;Zhang Xing;Kubo Keisuke;Kohno Masamichi;Takata Yasuyuki;Ikuta Tatsuya;Takahashi Koji
通讯作者：
Takahashi Koji
影响因子：
4.6
作者：
M. Takashiri;T. Shirakawa;K. Miyazaki;H. Tsukamoto
通讯作者：
M. Takashiri;T. Shirakawa;K. Miyazaki;H. Tsukamoto
影响因子：
64.8
作者：
L. Rosenhead
通讯作者：
L. Rosenhead
DOI：
10.1115/1.4006597
发表时间：
2012-11
期刊：
Journal of Applied Mechanics
影响因子：
--
作者：
E. Suhir;A. Shakouri
通讯作者：
E. Suhir;A. Shakouri