Surface scaling analysis of textured MgO thin films fabricated by energetic particle self-assisted deposition
Surface scaling analysis of textured MgO thin films fabricated by energetic particle self-assisted deposition
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高能粒子自辅助沉积织构氧化镁薄膜的表面尺度分析
DOI：
10.1016/j.apsusc.2017.12.179
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发表时间：
2018-04
影响因子：
6.7
通讯作者：
Pingfa Feng
中科院分区：
文献类型：
--
作者：
Feng Feng;Xiangsong Zhang;Timing Qu;Binbin Liu;Junlong Huang;Jun Li;Shaozhu Xiao;Zhenghe Han;Pingfa Feng
在高温超导涂层导体的制造中，缓冲层的表面粗糙度和织构会显着影响外延生长的超导层。通过离子束辅助沉积（IBAD）制造的双轴织构氧化镁缓冲层由于其厚度要求低而广泛用于涂覆导体的制造。在我们之前的研究中，提出了一种称为高能粒子自辅助沉积（EPSAD）的新方法，该方法仅使用没有离子源的溅射沉积设备，在非织构基底上制备双轴织构MgO薄膜。在本研究中，我们的目的是研究 EPSAD-MgO 薄膜的沉积机制。使用具有三种扫描尺度的原子力显微镜 (AFM) 测量研究表面粗糙度的行为（通过 Rq 评估），同时使用 X 射线衍射 (XRD) 测量面内和面外纹理。结果发现，EPSAD-MgO样品的表面粗糙度和织构随厚度增加的变化与文献报道的IBAD-MgO非常相似，揭示了它们沉积机制的相似性。此外，利用分形几何对EPSAD-MgO薄膜表面进行尺度分析。在两个尺度范围内发现了不同的尺度行为，并讨论了不同尺度范围内分形性质的指示。
In the fabrication of a high-temperature superconducting coated conductor, the surface roughness and texture of buffer layers can significantly affect the epitaxially grown superconductor layer. A biaxially textured MgO buffer layer fabricated by ion beam assisted deposition (IBAD) is widely used in the coated conductor manufacture due to its low thickness requirement. In our previous study, a new method called energetic particle self-assisted deposition (EPSAD), which employed only a sputtering deposition apparatus without an ion source, was proposed for fabricating biaxially textured MgO films on non-textured substrates. In this study, our aim was to investigate the deposition mechanism of EPSAD-MgO thin films. The behavior of the surface roughness (evaluated byRq) was studied using atomic force microscopy (AFM) measurements with three scan scales, while the in-plane and out-of-plane textures were measured using X-ray diffraction (XRD). It was found that the variations of surface roughness and textures along with the increase in the thickness of EPSAD-MgO samples were very similar to those of IBAD-MgO reported in the literature, revealing the similarity of their deposition mechanisms. Moreover, fractal geometry was utilized to conduct the scaling analysis of EPSAD-MgO film's surface. Different scaling behaviors were found in two scale ranges, and the indications of the fractal properties in different scale ranges were discussed.
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DOI：
10.1524/zpch.1996.193.part_1_2.218a
发表时间：
1996
期刊：
Zeitschrift für Physikalische Chemie
影响因子：
--
作者：
G. Vojta
通讯作者：
G. Vojta
影响因子：
2.1
作者：
Ya Zhao;Y. Qian;Weichao Yu;Zuyao Chen
通讯作者：
Ya Zhao;Y. Qian;Weichao Yu;Zuyao Chen
影响因子：
2.3
作者：
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通讯作者：
Enduo Gao;Zhimin Liu;Hongjian Li;Hui Xu;Zhenbin Zhang;Xiao Zhang;Xin Luo;Fengqi Zhou
影响因子：
1.6
作者：
F. Family
通讯作者：
F. Family
DOI：
10.1088/0022-3727/46/4/045204
发表时间：
2013-01
期刊：
Journal of Physics D: Applied Physics
影响因子：
--
作者：
M. Bowes;P. Poolcharuansin;J. Bradley
通讯作者：
M. Bowes;P. Poolcharuansin;J. Bradley