Novel Atmospheric Pressure Inductively Coupled Micro Plasma Source Using Floating Wire Electrode

Novel Atmospheric Pressure Inductively Coupled Micro Plasma Source Using Floating Wire Electrode
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采用浮动线电极的新型大气压感应耦合微等离子体源

DOI:
10.1143/jjap.50.08ja02
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发表时间:
2011
影响因子:
1.5
通讯作者:
M. Sasaki
M. Sasaki
中科院分区:
物理与天体物理4区
文献类型:
--
作者:
S. Kumagai;H. Matsuyama;Y. Yokoyama;M. Hori;M. Sasaki

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提出了一种新型的大气压力电感耦合微等离子体源。在一匝天线线圈的u型铜电极的中心内设置气体流动通道。等离子体区是为与光谱仪狭缝孔径的光学耦合而设计的中心线性沟槽。首先将浮丝电极放置在气通道的沟槽内,而不与电源有线连接。玻璃窗板覆盖气体通道,允许从线性沟槽发射光。在He气体流下,等离子体在100 MHz甚高频(VHF)功率下以~ 18 W点燃,光发射随功率增加而增加。没有浮丝电极,等离子体即使在200w下也不会点燃。浮丝电极提高了点火性能。介绍了浮丝电极和ICMP源的特性。
A novel atmospheric pressure inductively coupled micro-plasma (ICMP) source is proposed. The gas flow channel is prepared inside the center of the U-shaped Cu electrode of a one-turn antenna coil. The plasma region is the center linear trench designed for the optical coupling with the slit aperture of the spectrometer. A floating wire electrode is first placed inside the trench of the gas channel without the wired connection to the power source. A glass window plate covers the gas channel allowing the optical emission from the linear trench. Under He gas flow, the plasma ignites at ∼18 W of 100 MHz very high frequency (VHF) power, and the optical emission increases with the power. Without the floating wire electrode, the plasma does not ignite even at 200 W. The floating wire electrode enhances the ignition. The characteristics of the floating wire electrode and the ICMP source are described.
微型等离子体发生器
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