Novel Atmospheric Pressure Inductively Coupled Micro Plasma Source Using Floating Wire Electrode
Novel Atmospheric Pressure Inductively Coupled Micro Plasma Source Using Floating Wire Electrode
复制标题
采用浮动线电极的新型大气压感应耦合微等离子体源
DOI:
10.1143/jjap.50.08ja02
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发表时间:
2011
影响因子:
1.5
通讯作者:
M. Sasaki
中科院分区:
文献类型:
--
作者:
S. Kumagai;H. Matsuyama;Y. Yokoyama;M. Hori;M. Sasaki
A novel atmospheric pressure inductively coupled micro-plasma (ICMP) source is proposed. The gas flow channel is prepared inside the center of the U-shaped Cu electrode of a one-turn antenna coil. The plasma region is the center linear trench designed for the optical coupling with the slit aperture of the spectrometer. A floating wire electrode is first placed inside the trench of the gas channel without the wired connection to the power source. A glass window plate covers the gas channel allowing the optical emission from the linear trench. Under He gas flow, the plasma ignites at ∼18 W of 100 MHz very high frequency (VHF) power, and the optical emission increases with the power. Without the floating wire electrode, the plasma does not ignite even at 200 W. The floating wire electrode enhances the ignition. The characteristics of the floating wire electrode and the ICMP source are described.
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DOI:
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发表时间:
2004
期刊:
影响因子:
--
作者:
通讯作者:
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DOI:
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发表时间:
2007
期刊:
Bunseki Kagaku 56
影响因子:
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作者:
N. Saito;et. al.
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影响因子:
2.1
作者:
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通讯作者:
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影响因子:
3.2
作者:
T. Ichiki;Ryo Taura;Y. Horiike
通讯作者:
T. Ichiki;Ryo Taura;Y. Horiike
DOI:
--
发表时间:
2003
期刊:
Plasma Sources Sci. Technol. 12
影响因子:
--
作者:
石井 彰三;八田 章光;秋山 秀典;Sudo et al.;T. Ichiki
通讯作者:
T. Ichiki