Femtosecond laser-induced sub-wavelength modification in lithium niobate single crystal

Femtosecond laser-induced sub-wavelength modification in lithium niobate single crystal
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飞秒激光诱导铌酸锂单晶亚波长改性

DOI:
10.1088/1464-4258/10/3/035301
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发表时间:
2008-03
期刊:
影响因子:
2.1
通讯作者:
--
中科院分区:
物理与天体物理4区
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--
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研究了800 nm飞秒激光脉冲烧蚀铌酸锂(LiNbO 3)单晶的微观结构改性。利用扫描电子显微镜(SEM)、原子力显微镜(AFM)和拉曼显微镜系统对烧蚀斑进行了观察。用20×显微物镜(NA= 0.5)聚焦的飞秒激光烧蚀LiNbO3晶体,获得了亚波长光斑。在170 nJ单脉冲和100 nJ 17脉冲烧蚀下,光斑尺寸分别为400和800 nm。在烧蚀斑的底部发现了周期性的波纹,其宽度为100 nm,谷之间的周期约为200 nm。结果表明,飞秒激光烧蚀可以在多光子激发下形成亚波长结构,是制备铌酸锂基光学器件的一种新方法.
The microstructural modification of lithium niobate (LiNbO 3) single crystal ablated by an 800 nm femtosecond laser pulse has been investigated. The ablation spots have been examined by means of scanning electron microscopy (SEM), atomic force microscopy (AFM) and Raman microscopy systems. Sub-wavelength spots in an LiNbO 3 crystal ablated by a femtosecond laser focused with a 20× microscope objective (NA= 0.5) have been achieved. The spot size is 400 and 800 nm with 170 nJ single-pulse and 100 nJ 17-pulse ablation, respectively. The periodic ripples on the bottom of the ablation spot were found, and it has a width of 100 nm and a period of roughly 200 nm between troughs. The results show that the sub-wavelength structures may be formed by the multiple-photon excitation, and the femtosecond laser ablation is an innovative tool for manufacturing LiNbO 3-based optical devices.
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