Narrower Nanoribbon Biosensors Fabricated by Chemical Lift-off Lithography Show Higher Sensitivity.
Narrower Nanoribbon Biosensors Fabricated by Chemical Lift-off Lithography Show Higher Sensitivity.
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化学升降光刻制造的较窄的纳米替比生物传感器显示出更高的灵敏度。
DOI：
10.1021/acsnano.0c07503
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发表时间：
2021-01-26
期刊：
影响因子：
17.1
通讯作者：
Andrews AM
中科院分区：
文献类型：
--
作者：
Zhao C;Liu Q;Cheung KM;Liu W;Yang Q;Xu X;Man T;Weiss PS;Zhou C;Andrews AM
晶圆级纳米场效应晶体管（FET）的生物传感器制造的简单的自上而下的过程被证明是一个广泛的生物目标的高灵敏度的传感平台。纳米带与350纳米的宽度（700纳米间距）图案化的化学剥离光刻使用高吞吐量，低成本的商业数字多功能光盘（DVD）作为主。剥离光刻也被用于图案化带与2-μm或20-μm的宽度（4-μm或40-μm的间距，分别使用由光刻制造的母版）。对于所有的宽度，高度对准，准一维（1D）的带状阵列，产生超过厘米的长度尺度通过溅射存款20纳米的薄膜In 2 O3作为半导体。与20 μ m宽的微带相比，具有350 nm宽的纳米带的FET传感器在宽范围（pH 5至10）内对pH表现出更高的灵敏度。与微纳米场效应晶体管相比，在高离子强度缓冲液中，用羟色胺特异性适体官能化的纳米场效应晶体管对等摩尔5-羟色胺表现出更大的响应。与20 μm微纳米场效应管相比，具有350 nm宽的单链DNA功能化纳米带的场效应管在检测互补DNA杂交方面表现出更高的灵敏度。总之，我们说明了简易的制造和使用的大面积，均匀的In 2 O3 nanoriginal FET的离子，小分子，和寡核苷酸检测，更高的表面积与体积比转化为更好的检测灵敏度。目录图表和概要
Wafer-scale nanoribbon field-effect transistor (FET) biosensors fabricated by straightforward top-down processes are demonstrated as sensing platforms with high sensitivity to a broad range of biological targets. Nanoribbons with 350-nm widths (700-nm pitch) were patterned by chemical lift-off lithography using high throughput, low-cost commercial digital versatile disks (DVDs) as masters. Lift-off lithography was also used to pattern ribbons with 2-μm or 20-μm widths (4-μm or 40-μm pitches, respectively) using masters fabricated by photolithography. For all widths, highly aligned, quasi-one-dimensional (1D) ribbon arrays were produced over centimeter length scales by sputtering to deposit 20-nm-thin-film In2O3 as the semiconductor. Compared to 20-μm-wide microribbons, FET sensors with 350-nm wide nanoribbons showed higher sensitivity to pH over a broad range (pH 5 to 10). Nanoribbon FETs functionalized with a serotonin-specific aptamer demonstrated larger responses to equimolar serotonin in high ionic strength buffer compared to microribbon FETs. Field-effect transistors with 350-nm-wide nanoribbons functionalized with single-stranded DNA showed greater sensitivity to detecting complementary DNA hybridization vs 20-μm microribbon FETs. In all, we illustrate facile fabrication and use of large-area, uniform In2O3 nanoribbon FETs for ion, small molecule, and oligonucleotide detection where higher surface-to-volume ratios translate to better detection sensitivities. Table of Contents Graphic and Synopsis
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影响因子：
4.1
作者：
Jeon, Jin-Hyeok;Cho, Won-Ju
通讯作者：
Cho, Won-Ju
影响因子：
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影响因子：
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作者：
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通讯作者：
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影响因子：
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作者：
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影响因子：
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作者：
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通讯作者：
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