Light forms tiny 3D structures
Light forms tiny 3D structures
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光形成微小的 3D 结构
DOI：
10.1117/2.1200603.0181
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发表时间：
2006
期刊：
影响因子：
--
通讯作者：
H. Misawa
中科院分区：
文献类型：
--
作者：
H. Misawa
当前科学技术的小型化趋势主要是通过材料的平面二维加工来维持的。向固有 3D 制造的转变可以提高微芯片的效率和功能。最有前途的具有亚微米分辨率的 3D 加工工具是紧密聚焦的激光束。这种光束不仅可以将能量传递到材料的表面，还可以传递到其内部。材料的 3D 光改性取决于利用非线性光学吸收现象的过程，其中最强的是双光子吸收。在这里，我们讨论两种 3D 光结构化方法：光聚合和使用飞秒激光脉冲进行介电击穿，飞秒激光脉冲聚焦得非常紧密，光斑尺寸与波长相当。 3D光聚合抗蚀剂和树脂可以实现小于100nm的特征尺寸。 2 聚合材料所需的临界曝光可以通过直接激光写入的串行方法或全息图案化的并行方法累积。在直接激光写入方法中（见图 1），多个激光脉冲提供非线性吸收的能量。全息方法依赖于多个光束和脉冲之间的干涉（见图 2）。 7 另一种并行方法使用微透镜阵列和直接激光写入来创建多个光束焦点。 8 全息记录可以控制干涉光束的相位和偏振，是形成复杂 3D 晶格的通用方法。 10 通过控制干涉光束的偏振而增加的制造可能性使得该方法能够形成光学活性光子结构或其模板。如图 3 所示，一些可能性包括使用三个干涉侧光束制成的手性图案或表现出光子带隙的图案（由四个光束形成的类金刚石图案）。六个侧光束和中心圆偏振光束之间的干涉可以形成螺旋图案。通过添加反向传播的圆偏振光束，干涉形成环状结构的 3D 图案，这可能有助于研究左手材料。请注意，一维光子结构也可以通过干扰圆偏振一侧来形成。图 1。螺旋光子晶体模板的两个视图，其中顶层包含有意的缺陷。使用波长为 800nm、0.5nJ 脉冲、180fs 长和重复率为 1kHz 的直接激光写入将光子晶体记录在 SU-8 抗蚀剂中。在每次曝光之间，光束横向移动 20 nm。
The current trend toward miniaturization in science and technology is sustained mainly by planar two-dimensional processing of materials. A shift to inherently-3D fabrication could increase the efficiency and functionality of micro-chips. The most promising 3D processing tool that is capable of sub-micrometer resolution is a tightly-focused laser beam. Such a beam can deliver energy not just to a material’s surface, but inside its volume. 3D photo-modification of materials depends on processes that uses nonlinear optical absorption phenomena, the strongest of which is two-photon absorption. Here, we discuss two methods of 3D photo-structuring: photopolymerization, and dielectric breakdown using femtosecond laser pulses that have been focused so tightly that the spot size is comparable to the wavelength. 3D photo-polymerized resists and resins can achieve features sizes smaller than 100nm. 2 The critical exposure necessary to polymerize the material can accumulate either by the serial method of direct laser writing or by the parallel method of holographic patterning. In the direct-laser-writing method (see Figure 1), multiple laser pulses provide the energy for nonlinear absorption. The holographic method depends on interference between several beams and pulses (see Figure 2). 7 Another parallel method uses a microlens array with direct laser writing to create multiple beam foci. 8 Holographic recording allows control of the phases and polarizations of interfering beams and is a versatile method for forming complex 3D lattices. 10 The fabrication possibilities added by controlling the polarizations of interfering beams allows this method to form optically-active photonic structures or their templates. Some possibilities, shown in Figure 3, include chiral patterns made using three interfering side-beams or patterns exhibiting a photonic bandgap (the diamond-like pattern formed by four beams). The interference between six side beams and a central circularly-polarized beam can form spiral patterns. By adding a counter-propagating circularly-polarized beam, the interference forms a 3D pattern of ring-like structures that may be useful for studying left-handed materials. Note that 1D photonic structures can also be formed by interfering one circularly-polarized sideFigure 1. Two views of a spiral photonic-crystal template that includes an intentional defect in the top layer. The photonic crystal was recorded in SU-8 resist using direct laser writing at a wavelength of 800nm, with 0.5nJ pulses 180fs long, and a repetition rate of 1kHz. Between each exposure, the beam was shifted laterally by 20nm.
DOI：
10.1007/s00339-004-3108-x
发表时间：
2005-02-01
影响因子：
2.7
作者：
Matsuo, S;Juodkazis, S;Misawa, H
通讯作者：
Misawa, H
影响因子：
3.5
作者：
Juodkazis, S;Mizeikis, V;Misawa, H
通讯作者：
Misawa, H