He Buffer Gas for Moderating the Kinetic Energy of Pulsed Laser Deposition Plumes
He Buffer Gas for Moderating the Kinetic Energy of Pulsed Laser Deposition Plumes
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用于调节脉冲激光沉积羽流动能的 He 缓冲气体
DOI：
10.1021/acs.cgd.1c00456
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发表时间：
2021
期刊：
影响因子：
--
通讯作者：
Lippmaa Mikk
中科院分区：
文献类型：
--
作者：
Takahashi Ryota;Yamamoto Takahisa;Lippmaa Mikk
本文研究了氦缓冲气体对srtio3薄膜生长过程中脉冲激光沉积（PLD）羽流动能调节的影响。采用钕钇铝石榴石（Nd:YAG）激光靶烧蚀，通过PLD生长出原子光滑的srtio3薄膜。由于存在晶体缺陷，srtio3薄膜的晶格参数与立方体积值不同，形成四方畸变结构。发现缺陷存在的原因之一是Nd:YAG激光器在高能量密度下产生的烧蚀羽流的高动能。羽流中离子化物质的动能超过100 eV，这意味着到达薄膜表面的附着原子有足够的能量从沉积的srtio3薄膜表面反射原子，形成点缺陷。在不降低沉积速率的情况下，采用He和o2混合气氛调节羽流动能。在总压为0.6 Torr时，动能降低了近10倍，而o2压力保持在10-5Torr。减小羽流动能和相应的膜表面重镀提高了srtio3薄膜的结晶度。氦气压力是调节氧化膜功能性能的重要工艺参数。我们证明了He对srtio3薄膜的两个特性，即极性状态的出现和透水性的影响，这两个特性对结构缺陷的存在都很敏感。
We have investigated the effect of helium buffer gas on the moderation of the kinetic energy of pulsed laser deposition (PLD) plumes during the growth of SrTiO3thin films. Atomically smooth SrTiO3thin films were grown by PLD using a neodymium yttrium aluminum garnet (Nd:YAG) laser for target ablation. The lattice parameters of the SrTiO3thin films were found to be different from the cubic bulk value due to the presence of crystal defects, leading to the formation of a tetragonally distorted structure. One of the reasons for the presence of defects was found to be the high kinetic energy of the ablation plumes generated by the Nd:YAG laser operating at high energy densities. The kinetic energy of ionized species in the plume exceeded 100 eV, which means that adatoms arriving on the film surface had sufficient energy to resputter atoms from the surface of the deposited SrTiO3film, creating point defects. A mixed atmosphere of He and O2was used to moderate the plume kinetic energy without reducing the deposition rate. A nearly 10-fold reduction of the kinetic energy was obtained at a total pressure of 0.6 Torr, while the O2pressure was kept at 10–5Torr. Minimizing the plume kinetic energy and the associated film surface resputtering improved the crystallinity of SrTiO3thin films. The helium gas pressure was found to be an important process parameter for tuning the functional properties of oxide films. We demonstrate the He moderator effect on two characteristics of SrTiO3films, the appearance of a polar state and water permeability, both of which are sensitive to the presence of structural defects.
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DOI：
10.1080/23746149.2018.1523686
发表时间：
2018-10
期刊：
Advances in Physics: X
影响因子：
--
作者：
Hai-Tian Zhang;Zhen Zhang;Hua Zhou;Hidekazu Tanaka;D. Fong;S. Ramanathan
通讯作者：
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DOI：
--
发表时间：
2014
期刊：
影响因子：
--
作者：
Ryota Takahashi;Isao Ohkubo;Miho Kitamura;Masaharu Oshima;Yasuo Cho;Mikk Lippmaa
通讯作者：
Mikk Lippmaa
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影响因子：
3.3
作者：
M. Moll;M. Schlanges;T. Bornath;V. Krainov
通讯作者：
V. Krainov
影响因子：
4.6
作者：
Hensling FVE;Keeble DJ;Zhu J;Brose S;Xu C;Gunkel F;Danylyuk S;Nonnenmann SS;Egger W;Dittmann R
通讯作者：
Dittmann R
影响因子：
4
作者：
Jalan, Bharat;Moetakef, Pouya;Stemmer, Susanne
通讯作者：
Stemmer, Susanne