Simultaneous determination of the residual stress, elastic modulus, density and thickness of ultrathin film utilizing vibrating doubly clamped micro-/nanobeams
Simultaneous determination of the residual stress, elastic modulus, density and thickness of ultrathin film utilizing vibrating doubly clamped micro-/nanobeams
复制标题
利用振动双夹持微纳米梁同时测定超薄膜的残余应力、弹性模量、密度和厚度
DOI：
--
复制
发表时间：
2016
期刊：
影响因子：
--
通讯作者：
V. Mortet
中科院分区：
文献类型：
--
作者：
I. Stachiv;Chih;T. Fang;V. Mortet
由于必须使用几种非常复杂的设备，测量薄膜厚度及其基本特性可能具有很大的挑战性和耗时。在这里，我们报告了一个容易访问的共振为基础的方法，能够同时确定的残余应力，弹性模量，密度和厚度的双夹持微/纳米梁上的薄膜涂层。我们表明，轴向载荷上的谐振频率的一般依赖性也是有效的面内振动，和一个只取决于所考虑的振动模式。结果表明，薄膜的弹性模量、密度和厚度可以通过测量不同预压力下有膜和无膜微/纳米梁的面内和面外共振频率来计算。而残余应力则可以根据不同预应力下带膜梁的两个面外（面内）连续测量的共振频率来确定，而无需知道膜和子结构。
Measurement of ultrathin film thickness and its basic properties can be highly challenging and time consuming due to necessity of using several very sophisticated devices. Here, we report an easy accessible resonant based method capable to simultaneously determinate the residual stress, elastic modulus, density and thickness of ultrathin film coated on doubly clamped micro-/nanobeam. We show that a general dependency of the resonant frequencies on the axial load is also valid for in-plane vibrations, and the one depends only on the considered vibrational mode. As a result, we found that the film elastic modulus, density and thickness can be evaluated from two measured in-plane and out-plane fundamental resonant frequencies of micro-/nanobeam with and without film under different prestress forces. Whereas, the residual stress can be determined from two out-plane (in-plane) measured consecutive resonant frequencies of beam with film under different prestress forces without necessity of knowing film and subs...
影响因子：
4
作者：
Blake, P.;Hill, E. W.;Geim, A. K.
通讯作者：
Geim, A. K.
影响因子：
8.6
作者：
Karabalin RB;Villanueva LG;Matheny MH;Sader JE;Roukes ML
通讯作者：
Roukes ML