Ultrafast laser micromachining the ultra-low expansion glass-ceramic: Optimization of processing parameters and physical mechanism
Ultrafast laser micromachining the ultra-low expansion glass-ceramic: Optimization of processing parameters and physical mechanism
复制标题
超快激光微加工超低膨胀微晶玻璃：加工参数和物理机制的优化
DOI：
10.1016/j.jeurceramsoc.2021.05.018
复制
发表时间：
2021-09
影响因子：
5.7
通讯作者：
Tao Haizheng
中科院分区：
文献类型：
--
作者：
Xiong Siyi;Wang Rongping;Tao Haizheng
为满足惯性导航用激光陀螺的精度要求，以平均表面粗糙度、锥度角和圆度为指标，对商品化超低膨胀微晶玻璃（ULGC）的超快激光微加工工艺参数进行了优化。此外，通过仔细的表征，我们确定了光暗化，结晶，熔化，发泡和蒸发区域的超快激光与ULGC相互作用过程中的顺序出现。特别地，发泡区域被确定为有效地调解不同区域之间的界面处的热应力。由于能量的高斯分布，高斯光束加工质量差的主要原因是形成了各种区域。通过使用贝塞尔光束，由于在照射区域中仅出现发泡区域的可能性，可以获得更高的表面质量。这一发现为优化工艺参数获得高质量的超快激光微加工表面提供了重要线索。
To fulfill the precise requirements of laser gyroscope for inertial navigation, using the mean surface roughness, taper angle and circularity degree as indicators, we optimize the processing parameters about ultrafast laser micromachining a commercial ultra-low expansion glass-ceramic (ULGC). Furthermore, through careful characterizations, we identify the sequential appearance of photo-darkening, crystalizing, melting, foaming and vaporizing regions during the interactions of ultrafast laser with ULGC. Especially, the foaming region is identified to effectively mediate the thermal stress at the interfaces between different regions. Originated from the Gaussian distribution of energy, poor processing quality by a Gaussian beam is mainly ascribed to the formation of various regions. By using a Bessel beam, higher surface quality could be obtained due to the possibility of the occurrence of only a foaming region in irradiated regions. This discovery gives us an important clue to optimize processing parameters to obtain high-quality ultrafast laser micromachining surface.
登录
查看更多内容
影响因子：
5
作者：
Zhaoqing Li;O. Allègre;Qianliang Li;Wei-rong Guo;Lin Li
通讯作者：
Zhaoqing Li;O. Allègre;Qianliang Li;Wei-rong Guo;Lin Li
影响因子：
2.8
作者：
J. R. Vázquez de Aldana;C. Romero;Joaquín Fernández;G. Gorni;M. Pascual;A. Durán;R. Balda
通讯作者：
J. R. Vázquez de Aldana;C. Romero;Joaquín Fernández;G. Gorni;M. Pascual;A. Durán;R. Balda
影响因子：
5.2
作者：
Jinyang Zhang;Y. Long;Shixian Liao;Hua-Tay Lin;Chengyong Wang
通讯作者：
Jinyang Zhang;Y. Long;Shixian Liao;Hua-Tay Lin;Chengyong Wang
影响因子：
5
作者：
Li, Zhaoqing;Wang, Xuefeng;Li, Lin
通讯作者：
Li, Lin
影响因子：
4
作者：
Morten M. Smedskjær
通讯作者：
Morten M. Smedskjær