Fabrication of Super-Hydrophobic Microchannels via Strain-Recovery Deformations of Polystyrene and Oxygen Reactive Ion Etch.

Fabrication of Super-Hydrophobic Microchannels via Strain-Recovery Deformations of Polystyrene and Oxygen Reactive Ion Etch.
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DOI:
10.3390/ma6083610
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发表时间:
2013-08-19
期刊:
Materials (Basel, Switzerland)
影响因子:
--
通讯作者:
Luo C
Luo C
中科院分区:
其他
文献类型:
--
作者:
Chakraborty A;Xiang M;Luo C

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在这篇文章中,我们报告了一种简单的方法来产生微柱(其顶部被亚微米皱纹覆盖)的内表面上的聚苯乙烯(PS)微通道,以及在PS基板的上表面上,基于应变恢复变形的PS和氧反应离子蚀刻(ORIE)。使用这种方法,两种类型的微柱覆盖的微通道的制造。它们的宽度为118 ~ 132 μm,深度为40 ~ 44 μm,侧壁倾角为53° ~ 64°。微柱使这些微通道具有超疏水特性。在通道结构化表面上观察到的接触角大于162°,并且使水滴从这些通道结构化基底滚下的倾斜角可小至1°。
In this article, we report a simple approach to generate micropillars (whose top portions are covered by sub-micron wrinkles) on the inner surfaces of polystyrene (PS) microchannels, as well as on the top surface of the PS substrate, based on strain-recovery deformations of the PS and oxygen reactive ion etch (ORIE). Using this approach, two types of micropillar-covered microchannels are fabricated. Their widths range from 118 μm to 132 μm, depths vary from 40 μm to 44 μm, and the inclined angles of their sidewalls are from 53° to 64°. The micropillars enable these microchannels to have super-hydrophobic properties. The contact angles observed on the channel-structured surfaces are above 162°, and the tilt angles to make water drops roll off from these channel-structured substrates can be as small as 1°.
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