Wear Resistance of TiNx/CFy Coatings Deposited by RF Magnetron Co-Sputtering
Wear Resistance of TiNx/CFy Coatings Deposited by RF Magnetron Co-Sputtering
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射频磁控共溅射 TiNx/CFy 涂层的耐磨性
DOI：
10.1016/j.jmst.2015.11.003
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发表时间：
2015-12
影响因子：
10.9
通讯作者：
刘壮
中科院分区：
文献类型：
--
作者：
朱琳;王金武;刘壮
采用射频磁控共溅射法制备了双圆柱形靶材和Ar、n2混合物的TiNx/ cfc复合涂层。利用x射线光电子能谱（XPS）和卢瑟福背散射光谱（RBS）分析了沉积在不同位置的涂层的成分。结果表明，沉积的涂层在不同的沉积位置具有不同的TiNxand cfy含量，从而导致不同的结构和性能。随着tinx浓度的增加，复合镀层的硬度从32 HV增加到1603 HV。水的静态接触角在20°~ 102°之间，随着丁烯的加入而减小。氟基的存在增加了涂层与滴入溶液的接触角，可以有效地保护涂层免受腐蚀，提高涂层在高相对湿度（RH）条件下的耐磨性。由于碳纤维构件的柔软性，涂层的脆性降低，可以承受大部分载荷，从而减少裂纹形成的可能性。XPS结果表明，复合涂层中存在Tisingle键（cn）化学键，提高了涂层的耐磨性。结果表明，涂层的耐磨性与硬度无关。然而，这些性能取决于均匀的结构和TiNxand CFyphases之间的化学键的存在。此外，软的CFyphase和硬的TiNxphase之间的特定比例可以产生具有良好耐磨性的涂层。
TiNx/CFycomposite coatings were prepared by RF magnetron co-sputtering using twin cylindrical tube targets with Ar and N2mixtures. The composition of the coatings deposited at various positions was analyzed by X-ray photoelectron spectroscopy (XPS) and Rutherford back-scattering spectrometry (RBS). The results revealed that the composition of the deposited coatings has a wide range of TiNxand CFycontents at different deposition positions, which leads to different structures and performances. The hardness of the composite coatings increases from 32 to 1603 HV with increasing the TiNxconcentration. The static contact angle of water ranges from 20° to 102° and decreases upon the incorporation of more TiNxinto the CFypolymer. The presence of the CFygroups enhances the contact angle between the coating and the solutions dropped onto it, which could effectively protect the coating from corrosion and improve the wear resistance properties in high relative humidity (RH). The brittleness of the coatings decreases due to the softness of the CFycomponent, which can bear most of the load and result in less probability of crack formation. XPS results demonstrate the existence of a Tisingle bond(C N) chemical bond in the composite coatings, which improves the wear resistance of the coatings. It is indicated that the wear resistance of the TiNx/CFycoatings is independent of the hardness. However, these properties depend on the uniform structure and the existence of chemical bonding between the TiNxand CFyphases. Moreover, a specific ratio between the soft CFyphase and the hard TiNxphase can produce coatings with good wear resistance.
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影响因子：
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作者：
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