Micro-patterning of self-assembled organic monolayers by using tunable ultrafast laser pulses
Micro-patterning of self-assembled organic monolayers by using tunable ultrafast laser pulses
复制标题
使用可调谐超快激光脉冲对自组装有机单层进行微图案化
DOI：
10.1117/12.2037716
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发表时间：
2014
期刊：
影响因子：
--
通讯作者：
Andreas Ostendorf
中科院分区：
文献类型：
--
作者：
Stella Maragkaki;Andreas Aumann;Florian Schulz;Anja Schröter;Benjamin Schöps;Steffen Franzka;Nils Hartmann;Andreas Ostendorf
研究了可调谐超快激光脉冲在非共线光参量放大自组装有机单层膜微图案化中的应用。自组装膜是一种有机单层膜，可以以多种方式组装功能化的表面结构。在我们的研究中，我们调查的特点，自组装膜作为单分子抗蚀剂在蚀刻的黄金。NOPA是一种多功能的方法，它提供了超快激光脉冲的产生，具有在可见光和近红外范围内的可调谐波长。由于非共线的几何形状，可以放大加宽的光谱范围。NOPA在非线性转换后使用棱镜压缩器以亚30飞秒范围内的激光脉冲长度提供480 nm至950 nm范围内的波长。超短激光技术与NOPA系统的优势一起保证了高精度，并允许我们通过研究能量密度和波长的影响来确定亚波长图案化的最佳条件。同时，单脉冲处理使我们能够选择性地去除有机涂层，同时确保缩短处理时间。在我们的研究中，我们使用基于硫醇的自组装膜作为镀金玻璃基板上的自组装层，膜厚度分别为1-2 nm和40 nm。
We study the application of tunable ultrafast laser pulses in micropatterning self- assembled organic monolayer (SAMs) employing non collinear optical parametric amplification (NOPA). SAMs are ultrathin organic monolayers, which can be used in a variety of ways to assemble functionalized surface structures. In our study, we investigate the characteristics of SAMs as monomolecular resists during etching of gold. NOPA is a versatile method which provides the generation of ultrafast laser pulses, with a tunable wavelength in the visible and near infrared range. Due to the noncollinear geometry, a broadened spectral range can be amplified. The NOPA delivers wavelengths in the range of 480 nm to 950 nm at laser pulse lengths in the sub- 30 femtosecond range using a prism compressor after the nonlinear conversion. The ultrashort laser technology together with the advantages of the NOPA system guarantee high precision and allows us to determine the optimum conditions of sub-wavelength patterning by studying the effects of the fluence and the wavelength. At the same time, single-pulse processing allows us to selectively remove the ultrathin organic coating, while it ensures short processing time. In our study we used thiol-based SAMs as ultrathin layers on gold-coated glass substrates with a film thickness of 1-2 nm and 40 nm respectively.
自组装有机单层作为高分辨率抗蚀剂，用于单飞秒激光脉冲的快速非线性处理
DOI：
--
发表时间：
2010
期刊：
影响因子：
--
作者：
Mareike Mathieu;S. Franzka;J. Koch;B. Chichkov;N. Hartmann
通讯作者：
N. Hartmann
DOI：
10.1143/jjap.35.5866
发表时间：
1996-11-01
期刊：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
影响因子：
--
作者：
Nishida, N;Hara, M;Knoll, W
通讯作者：
Knoll, W
通过单飞秒激光脉冲非线性处理对烷基硅氧烷单层进行亚波长图案化
影响因子：
4
作者：
N. Hartmann;S. Franzka;J. Koch;A. Ostendorf;B. Chichkov
通讯作者：
B. Chichkov