EUV multilayer mirrors in solar X-EUV Imager

EUV multilayer mirrors in solar X-EUV Imager
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太阳能 X-EUV 成像仪中的 EUV 多层镜

DOI:
10.1016/j.ijleo.2020.164213
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发表时间:
2020-02
期刊:
影响因子:
3.1
通讯作者:
Zhou Hongjun
Zhou Hongjun
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
Wang Haifeng;Wang Xiaodong;Chen Bo;Wang Yunqi;Mao Shilei;Ren Shuai;Zhou Peng;Liu Yang;Huo Tonglin;Zhou Hongjun

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铁谱线(19.5nm)是太阳光谱成像探测的重要目标之一,采用19.5nm多层膜反射镜反射19.5nm谱线并抑制旁瓣。19.5风云三号卫星太阳X极紫外成像仪需要带宽为1.0nm的多层膜反射镜。在垂直入射和45°入射下,多层膜反射镜中Mo层的厚度比分别为0.15和0.11。讨论了粗糙度/漫射对反射率的影响,并分析了沉积后衬底的轮廓变化。
Fe Ⅻ line (19.5 nm) is one of important targets of imaging detection in solar spectrum, and 19.5 nm multilayer mirrors were employed to reflect 19.5 nm line and suppress sidelobe. 19.5 nm multilayer mirrors with a bandwidth of 1.0 nm are in demand in Solar X-EUV imager installed in FengYun Ⅲ satellite. Thickness ratios of Mo layer of 0.15 and 0.11, respectively, are utilized in multilayer mirrors at normal and 45° incidence. The influence of roughness/diffusion on reflectance is discussed, and profile changes of substrate after deposition are also analyzed.
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