Force- and time-dependent feature size and shape control in molecular printing via polymer-pen lithography.
Force- and time-dependent feature size and shape control in molecular printing via polymer-pen lithography.
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DOI：
10.1002/smll.200901538
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发表时间：
2010-05-21
期刊：
影响因子：
13.3
通讯作者：
Mirkin, Chad A.
中科院分区：
文献类型：
--
作者：
Liao, Xing;Braunschweig, Adam B.;Zheng, Zijian;Mirkin, Chad A.
我们最近报道了一种新的扫描探针接触印刷方法，称为聚合物笔光刻（PPL）[1，2]，其结合了微接触印刷（μCp）[3-7]和蘸笔纳米光刻（DPN）[8-11]的优点，以实现高通量分子印刷（印刷具有亚微米特征尺寸的分子吸附层，其可以化学吸附到底层基底上）。PPL是一种无光刻胶的光刻方法，它使用弹性针尖在一个写入步骤中打印出光斑尺寸从90 nm到10 μm以上的数字化图案。一个典型的聚合物笔阵列包含从数千到多达107个金字塔形的弹性体尖端，这些尖端是用通过传统的光刻和随后的化学蚀刻制备的母版制成的。一旦母版已经制备好，每个笔阵列中使用的弹性体的材料成本小于1美元。当尖锐的尖端与基底接触时，油墨被输送到这些点，并且通过反复地将阵列降低到表面来生成图案。由于弹性体尖端阵列吸收油墨并充当储液器，因此相同的聚合物阵列可用于在较大的印刷面积上印刷。
We have reported recently a new scanning-probe contact-printing method, termed polymerpen lithography (PPL),[1, 2] that combines the advantages of microcontact printing (μCp)[3-7] and dip-pen nanolithography (DPN)[8-11] to achieve high-throughput molecular printing (the printing of adlayers of molecules with sub-micrometer feature size, which can chemisorb to an underlying substrate). PPL is a cantilever-free lithographic approach that uses elastomeric tips to print a digitized pattern with spot sizes ranging from 90 nm to over 10 μm in a single writing step. A typical polymer-pen array contains from thousands to as many as 107 pyramidal elastomeric tips that are made with a master prepared by conventional photolithography and subsequent chemical etching. Once the master has been prepared, the material cost of the elastomer used in each pen array is less than $1. When the sharp tips are brought into contact with the substrate, ink is delivered at these points, and a pattern is generated by repeatedly lowering the array to the surface. Because the elastomeric tip array absorbs ink and acts as a reservoir, the same polymer array can be used to print over large
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影响因子：
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