Flexible tactile sensor for shear stress measurement using transferred sub-µm-thick Si piezoresistive cantilevers
Flexible tactile sensor for shear stress measurement using transferred sub-µm-thick Si piezoresistive cantilevers
复制标题
使用转移的亚微米厚硅压阻悬臂梁进行剪切应力测量的柔性触觉传感器
DOI：
10.1088/0960-1317/22/11/115025
复制
发表时间：
2012
影响因子：
2.3
通讯作者：
I. Shimoyama
中科院分区：
文献类型：
--
作者：
K. Noda;H. Onoe;E. Iwase;Kiyoshi Matsumoto;I. Shimoyama
我们提出了一个灵活的触觉传感器，使用亚微米厚的硅压阻悬臂梁的剪切应力检测。在绝缘体上硅（SOI）晶片的器件层上制作了薄硅压阻悬臂梁。通过使用基于粘附的转移方法，仅将这些薄且易碎的悬臂梁从SOI晶片的刚性处理层转移到聚二甲基硅氧烷层而没有损坏。由于薄硅悬臂梁具有高的弯曲耐久性，因此所提出的传感器可以附接到用作机器人手的手指的细杆型结构。杠杆在正交方向上排列，以独立地测量所施加的剪切应力的X和Y方向分量。我们对柔性触觉传感器的弯曲耐久性进行了评估，确认传感器可以安装在半径为10 mm的杆上。安装在曲面上的柔性触觉传感器，在沿着其表面施加的剪切应力范围为-1.8 × 103 ~ 1.8 × 103 Pa时，灵敏度平均为1.7 × 10−6 Pa−1。它独立地检测所施加的剪切应力的X和Y方向分量。
We propose a flexible tactile sensor using sub-µm-thick Si piezoresistive cantilevers for shear stress detection. The thin Si piezoresistive cantilevers were fabricated on the device layer of a silicon on insulator (SOI) wafer. By using an adhesion-based transfer method, only these thin and fragile cantilevers were transferred from the rigid handling layer of the SOI wafer to the polydimethylsiloxane layer without damage. Because the thin Si cantilevers have high durability of bending, the proposed sensor can be attached to a thin rod-type structure serving as the finger of a robotic hand. The cantilevers were arrayed in orthogonal directions to measure the X and Y directional components of applied shear stresses independently. We evaluated the bending durability of our flexible tactile sensor and confirmed that the sensor can be attached to a rod with a radius of 10 mm. The sensitivity of the flexible tactile sensor attached to a curved surface was 1.7 × 10−6 Pa−1 on average for a range of shear stresses from −1.8 × 103 to 1.8 × 103 Pa applied along its surface. It independently detected the X and Y directional components of the applied shear stresses.
通过剥离和冲压转移实现异质硅微结构的三维集成
DOI：
--
发表时间：
2007
期刊：
Joumal of Micromechanics and Microengineering Vol.17
影响因子：
--
作者：
Hiroaki Onoe;Eiji Iwase;Kiyoshi Matsumoto;Isao Shimoyama
通讯作者：
Isao Shimoyama
DOI：
10.1109/robot.2009.5152758
发表时间：
2009-05
期刊：
2009 IEEE International Conference on Robotics and Automation
影响因子：
--
作者：
Yuki Fujimori;Y. Ohmura;T. Harada;Y. Kuniyoshi
通讯作者：
Yuki Fujimori;Y. Ohmura;T. Harada;Y. Kuniyoshi
影响因子：
2.7
作者：
Iwase, E;Shimoyama, I
通讯作者：
Shimoyama, I