Design and implementation of beaded cilia MEMS vector hydrophone
Design and implementation of beaded cilia MEMS vector hydrophone
复制标题
珠状纤毛MEMS矢量水听器的设计与实现
DOI：
10.1016/j.measurement.2021.109751
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发表时间：
2021-09
期刊：
影响因子：
5.6
通讯作者：
Wendong Zhang
中科院分区：
文献类型：
--
作者：
Ting Lv;Xiaoqi Liang;Guojun Zhang;Shasha Yang;Peng Chen;Xi Yang;Shan Zhu;Zhenzhen Shang;Boyuan Jing;Wendong Zhang
针对声隐身技术的发展增加了水下运动目标检测难度的问题，提出了一种串珠纤毛式MEMS矢量水听器(BCVH)。与以往的纤毛结构相比，它可以在不引入额外结构的情况下，扩大声波的接收面积，提高灵敏度。同时，减小了附加质量的引入和工作频段的损失，实现了结构的一次制造。本文通过理论分析和仿真，确定了BCVH的设计方案和最佳尺寸，并利用矢量水听器校准系统进行了验证。实验结果表明，该矢量水听器的灵敏度达到了−183.3.2%(@1 kHz，0 dB=1V/μPa)，比仿生纤毛MEMS矢量水听器提高了13.7d B。此外，BCVH的凹点深度大于30分贝，具有良好的方向性。
In view of the problem that the increased difficulty of underwater moving targets detection caused by the development of acoustic stealth technology, a beaded cilia MEMS vector hydrophone (BCVH) is proposed in this paper. Compared with previous cilia structures, it can enlarge the receiving area of acoustic wave to improve sensitivity without the introduction of additional structures. Meanwhile, the introduction of additional mass and the loss of working frequency band are reduced, and the structure is manufactured at one time. In this paper, the design scheme and optimal size of BCVH are determined via theoretical analysis and simulation, then vector hydrophone calibration system is used to verify it. The experimental results show that the sensitivity of BCVH reaches− 183.3 dB (@ 1kHz, 0 d B= 1 V/μ P a), 13.7 dB higher than bionic cilia MEMS vector hydrophone (CVH). Moreover, the depth of concave point of BCVH is more than 30 dB, which has a good directivity.
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