Method to Further Improve Sensitivity for High-Order Vibration Mode Mass Sensors With Stepped Cantilevers
Method to Further Improve Sensitivity for High-Order Vibration Mode Mass Sensors With Stepped Cantilevers
复制标题
进一步提高阶梯悬臂高阶振动模式质量传感器灵敏度的方法
DOI：
10.1109/jsen.2017.2712629
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发表时间：
2017-07
影响因子：
4.3
通讯作者：
Liu Shutian
中科院分区：
文献类型：
--
作者：
Gao Renjing;Huang Yu;Wen Xin;Zhao Jian;Liu Shutian
利用高阶振动模式是提高压电谐振式悬臂梁质量传感器灵敏度的有效途径。为了在不降低整体尺寸的情况下进一步提高高阶振型的灵敏度，提出了一种新的形状设计方法，通过优化悬臂梁轴线上的多阶梯厚度来提高所需高阶振型的灵敏度。利用所提出的方法，提出了一种新的四阶模式质量传感器，其中包括一个三阶压电-弹性复合材料悬臂梁。分析了结构参数对振型和灵敏度的影响。优化后的三阶梯悬臂梁传感器的灵敏度至少是同样工作在四阶振动模式下的均匀悬臂梁传感器的3.0倍。在此基础上，制作了阶跃厚度比为0.5、步长比为0.29的压电式质量传感器。实验结果表明，该传感器的四阶模式灵敏度可达185.41美元，是工作在一阶和四阶振动模式下的悬臂梁传感器的近19.5倍和3.0倍。同时，传感器的品质因数为82.65，约为矩形均匀悬臂梁传感器的3.5倍。仿真结果与实验结果基本一致，充分验证了新提出的灵敏度改进方法的可行性和有效性。
Using high-order vibration mode has been regarded as an effective way to improve the sensitivity of piezoelectric resonant cantilever mass sensors. To further improve the high-order mode sensitivity without reducing the overall dimension, a new shape design method was proposed to improve the sensitivity at the desired high-order vibration mode by optimizing the multi-stepped thickness along the cantilever axis. With the proposed method, a new fourth-order mode mass sensor is proposed incorporating a three-stepped piezoelectric-elastic composite cantilever. The effect of structural parameters on the vibration modes and also the sensitivity is analyzed. With the optimized three-stepped cantilever, the sensitivity can be at least 3.0 times that of the uniformed cantilever sensor also operated in the fourth-order vibration mode. Then, a piezoelectric mass sensor is fabricated with the step thickness ratio and step length ratio of 0.5 and 0.29. The experimental results show that the fourth-order mode sensitivity can achieve $185.41\times 10^{4}$ Hz/g, which is nearly 19.5 times and 3.0 times greater than those of the custom uniform cantilever sensor working in the first and fourth vibration modes. Meanwhile, the quality factor is 82.65 about 3.5 times as great as that of the rectangular uniform cantilever sensor. The nearly consistency between simulation and experiments fully validates the feasibility and effectiveness of the newly proposed sensitivity improving method.
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影响因子：
3.2
作者：
A. Kadam;G. Nordin;M. George
通讯作者：
A. Kadam;G. Nordin;M. George
DOI：
10.3390/s90806046
发表时间：
2009
期刊：
Sensors (Basel, Switzerland)
影响因子：
--
作者：
Ansari MZ;Cho C
通讯作者：
Cho C
影响因子：
1.6
作者：
Shen, Zuyan;Shih, Wan Y.;Shih, Wei-Heng
通讯作者：
Shih, Wei-Heng
影响因子：
8.4
作者：
Lochon, F;Dufour, I;Rebière, D
通讯作者：
Rebière, D
影响因子：
7.4
作者：
Tang, YJ;Fang, J;Thundat, T
通讯作者：
Thundat, T