Deflection, frequency, and stress characteristics of rectangular, triangular, and step profile microcantilevers for biosensors.
Deflection, frequency, and stress characteristics of rectangular, triangular, and step profile microcantilevers for biosensors.
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DOI：
10.3390/s90806046
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发表时间：
2009
期刊：
影响因子：
--
通讯作者：
Cho C
中科院分区：
文献类型：
--
作者：
Ansari MZ;Cho C
本研究提出了矩形，三角形和阶梯形轮廓的微悬臂梁的挠度，共振频率和应力的结果受到表面应力。这些悬臂梁可作为微悬臂梁生物传感器的敏感元件。为了提高微悬臂梁生物传感器的整体灵敏度，悬臂梁的偏转和谐振频率都应该增加。悬臂轮廓的变化和悬臂横截面形状的变化的影响，首先分别调查，然后一起。采用有限元软件ANSYS Multiphysics，对悬臂梁模型进行了实体有限元求解。将0.05N/m的表面应力施加到杠杆的顶表面。杠杆由弹性模量为130 GPa和泊松比为0.28的硅制成。为了表明本研究的一致性，数值结果与分析结果进行了比较。结果表明，三角形和阶梯形悬臂梁比矩形悬臂梁具有更好的挠度和频率特性。
This study presents the deflection, resonant frequency and stress results of rectangular, triangular, and step profile microcantilevers subject to surface stress. These cantilevers can be used as the sensing element in microcantilever biosensors. To increase the overall sensitivity of microcantilever biosensors, both the deflection and the resonant frequency of the cantilever should be increased. The effect of the cantilever profile change and the cantilever cross-section shape change is first investigated separately and then together. A finite element code ANSYS Multiphysics is used and solid finite elements cantilever models are solved. A surface stress of 0.05 N/m was applied to the top surface of the cantilevers. The cantilevers are made of silicon with elastic modulus 130 GPa and Poisson’s ratio 0.28. To show the conformity of this study, the numerical results are compared against their analytical ones. Results show that triangular and step cantilevers have better deflection and frequency characteristics than rectangular ones.
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