Thin film deposition based on microacoustic sol atomization (MASA)
Thin film deposition based on microacoustic sol atomization (MASA)
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基于微声溶胶雾化（MASA）的薄膜沉积
DOI：
10.1007/s10971-015-3927-6
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发表时间：
2016
影响因子：
2.5
通讯作者：
S. Menzel
中科院分区：
文献类型：
--
作者：
Winkler;A. Kirchner;P. Bergelt;R. Hühne;S. Menzel
AbstractIn这项工作中，我们展示了一种创新的方法沉积的功能薄膜，基于微声溶胶雾化（MASA）和随后的凝胶冷凝。该方法提供了优于现有溶胶-凝胶沉积方法的几个优点（例如，喷墨印刷或浸涂），包括液滴在低微米范围内的窄液滴尺寸分布、可雾化的气溶胶源和在卷对卷工艺中的主要可用性。该技术可以分为三个后续步骤：在第一步中，高频表面声波将前体溶液（溶胶）转化为超细气溶胶。在第二步骤中，气溶胶在基底表面上冷凝，形成凝胶，其在第三步骤中可以热解成结晶薄膜。本文介绍了在双轴织构Ni-5%W带材上沉积La 2 Zr 2 O 7缓冲层的新工艺。分别从基于丙酸或水的镧/锆前体溶液产生中值液滴直径为4和7.5 µm的气溶胶。持续产生气溶胶持续几分钟，使液滴在约1 cm × 5 cm的面积上凝结。 X射线衍射分析表明，La_2Zr_2O_7薄膜具有很强的（001）晶向，厚度约为100 nm。此外，我们的研究结果表明一个显着的影响的流体化学关于气溶胶的形成，以及液滴冷凝和薄膜的形成过程中，当撞击液滴含有残留solvent.Graphical Abstract的沉积功能薄膜的微声溶胶雾化（MASA）和随后的冷凝在这里证明为La 2 Zr 2 O 7缓冲层双轴织构Ni-5% W磁带。通过分别基于丙酸或水的镧/锆前体溶液与高功率表面声波的相互作用，产生了中值液滴直径为4和7.5 µm的气溶胶。持续产生气溶胶持续几分钟，使液滴在约1 cm × 5 cm的面积上凝结。X射线衍射分析表明，La_2Zr_2O_7薄膜具有很强的（001）取向，结晶质量高，厚度约为100 nm。
AbstractIn this work, we demonstrate an innovative method for the deposition of functional thin films, based on microacoustic sol atomization (MASA) and subsequent gel condensation. This method offers several advantages over existing sol–gel deposition methods (e.g., ink-jet printing or dip coating), including a narrow droplet-size distribution with droplets in the low micrometer range, a miniaturizable aerosol source and the principle usability in roll-to-roll processes. The technique can be divided into three subsequent steps: In a first step, high-frequency surface acoustic waves atomize precursor solutions (sols) into an ultra-fine aerosol. In a second step, the aerosol condensates on the substrate surface, forming a gel, which in a third step can be pyrolyzed into a crystalline thin film. The new technique is demonstrated for the deposition of La2Zr2O7buffer layers on biaxially textured Ni–5 %W tapes. Aerosols with median droplet diameters of 4 and 7.5 µm were produced from lanthanum/zirconium precursor solutions based on propionic acid or water, respectively. A continuous aerosol production was maintained for several minutes, allowing a droplet condensation on an area of about 1 cm × 5 cm. X-ray diffraction studies of the crystallized La2Zr2O7films with a thickness of about 100 nm show a high crystalline quality with a strong (001) orientation. Additionally, our results indicate a significant influence of the fluid chemistry regarding the aerosol formation, as well as the droplet condensation and the thin film formation process, when the impinging droplets contain residual solvent.Graphical AbstractThe deposition of functional thin films by microacoustic sol atomization (MASA) and subsequent condensation is demonstrated here for La2Zr2O7buffer layers on biaxially textured Ni–5 %W tapes. Aerosols with median droplet diameters of 4 and 7.5 µm were produced via interaction of lanthanum/zirconium precursor solutions based on propionic acid or water, respectively, with high-power surface acoustic waves. A continuous aerosol production was maintained for several minutes, allowing a droplet condensation on an area of about 1 cm × 5 cm. X-ray diffraction studies of the crystallized La2Zr2O7films with a thickness of about 100 nm show a high crystalline quality with a strong (001)-orientation.
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