Impact of surface phase coexistence on the development of step-free areas on Si(111)

Impact of surface phase coexistence on the development of step-free areas on Si(111)
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表面相共存对Si(111)无台阶区发展的影响

DOI:
10.1007/s11706-015-0282-z
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发表时间:
2014
影响因子:
2.7
通讯作者:
A. Fissel
A. Fissel
中科院分区:
材料科学3区
文献类型:
--
作者:
A. Fissel

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在Burton-Cabrera-Frank理论框架下,分析了Si(111)表面在(7×7)-“1×1”表面相变温度TCare附近的台阶流生长条件。特别是,共存的两个表面相远低于TC和他们的具体影响的阶梯流生长行为被认为是。我们假定在生长的动力学条件下,最初只由(7×7)相覆盖的表面分离成由“1×1”区域包围的畴。在这样的表面上,与仅具有(7×7)的表面相比,整体过饱和度应大幅降低,从而导致大得多的成核临界平台宽度。
The step-flow growth condition of Si on Si(111) near the (7×7)-“1×1” surface phase transition temperatureTCare analyzed within the framework of Burton-Cabrera-Frank theory. In particular, coexistence of both surface phases well belowTCand their specific influence on the step-flow growth behavior are considered. We presume that under dynamical condition of growth, the surface initially covered by only the (7×7) phase separates into domains surrounded by “1×1” areas. On such a surface, the overall supersaturation should be reduced drastically compared to a surface with only (7×7), resulting in much larger critical terrace width for nucleation.
Si(111) 同质外延的阶跃流 (7×7)↔(1×1) 超结构相变
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