Dependence of atomic oxygen resistance and the tribological properties on microstructures of WS2 films
Dependence of atomic oxygen resistance and the tribological properties on microstructures of WS2 films
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WS2 薄膜的原子氧电阻和摩擦学性能对微观结构的依赖性
DOI：
10.1016/j.apsusc.2014.01.002
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发表时间：
2014-04
影响因子：
6.7
通讯作者：
Liu, Weimin
中科院分区：
文献类型：
--
作者：
Wang, Desheng;Zhou, Feng;Weng, Lijun;Liu, Weimin
为了研究WS 2薄膜的抗氧化机理，采用射频溅射法制备了纯WS 2和掺Al的WS 2复合薄膜，并在地面原子氧模拟装置上进行了原子氧辐照试验。采用真空球盘摩擦磨损试验机研究了两种薄膜在AO辐照前后的摩擦学性能。少量Al掺杂的引入导致WS 2薄膜的微观结构从疏松的柱状片状结构转变为非常致密的结构。在纯WS 2薄膜中，WS 2以晶相存在，且沿晶面择优取向，而在WS 2-Al复合薄膜中，纳米晶和非晶共存。由于WS 2晶体的基面比边缘面具有更高的抗氧化能力，即使大量AO通过纵向孔进入内部，纯膜仍表现出良好的抗AO辐照性能。由于在次表层形成了有效的较薄的WO 3包覆层，复合膜具有优异的抗AO辐照性能。摩擦学结果表明，复合膜表现出显着改善的耐磨性，相比，纯WS 2膜。此外，由于有效的抗AO性能，WS 2薄膜的摩擦学性能在AO辐照前后几乎没有变化。
To study the anti-oxidation mechanism of WS2films, the pure WS2, and Al doped WS2composite films were prepared via radio frequency sputtering and the atomic oxygen (AO) irradiation tests were conducted using a ground AO simulation facility. The tribological properties of both films before and after AO irradiation were evaluated using vacuum ball-on-disk tribo-tester. The incorporation of a small fraction of Al dopant resulted in microstructure change from loose columnar platelet with significant porosity for pure WS2film to very dense structure. In pure WS2film, WS2exists as crystalline phase with edge-plane preferential orientation, but nanocrystalline and amorphous phase coexists for the WS2-Al composite film. Even if large amount of AO transported into the interior through the longitudinal pores, the pure film showed good AO irradiation resistance owing to the basal plane of WS2crystal exhibiting much higher anti-oxidation capacity than the edge-plane. The composite film also had excellent AO irradiation resistance due to the formation of effective thinner WO3cladding layer in the sub-surface layer. Tribological results revealed that the composite films showed a significantly improved wear resistance, in comparison to the pure WS2film. Besides, due to the effective AO resistance, the tribological properties of WS2films remained almost unchanged before and after AO irradiation.
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影响因子：
2.1
作者：
J. Zabinski;M. Donley;S. Walck;T. Schneider;N. T. McDevitt
通讯作者：
J. Zabinski;M. Donley;S. Walck;T. Schneider;N. T. McDevitt
影响因子：
6.7
作者：
Shusheng Xu;Xiaoming Gao;M. Hu;Jiayi Sun;D. Jiang;Feng Zhou;Wei-min Liu;L. Weng
通讯作者：
Shusheng Xu;Xiaoming Gao;M. Hu;Jiayi Sun;D. Jiang;Feng Zhou;Wei-min Liu;L. Weng
影响因子：
2.1
作者：
Deyang Yu;Jun-an Wang;J. Yang
通讯作者：
Deyang Yu;Jun-an Wang;J. Yang
影响因子：
3.2
作者：
M. Tagawa;M. Muromoto;S. Hachiue-;K. Yokota;N. Ohmae;K. Matsumoto;M. Suzuki
通讯作者：
M. Tagawa;M. Muromoto;S. Hachiue-;K. Yokota;N. Ohmae;K. Matsumoto;M. Suzuki
影响因子：
5.4
作者：
Sun-Mi Kim;Jinsub Choi
通讯作者：
Sun-Mi Kim;Jinsub Choi