Investigation on the profile of microhole generated by electrochemical micromachining using retracted tip tool

Investigation on the profile of microhole generated by electrochemical micromachining using retracted tip tool
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使用缩回尖端工具进行电化学微加工产生的微孔轮廓的研究

DOI:
10.1007/s00170-016-8535-2
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发表时间:
2016-03
影响因子:
3.4
通讯作者:
Yu Hongli
Yu Hongli
中科院分区:
工程技术3区
文献类型:
--
作者:
Liu Weidong;Ao Sansan;Li Yang;Liu Zuming;Zhang Hui;Luo Zhen;Yu Hongli

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电化学微加工技术以其几乎无刀具磨损、几乎无加力加工、无热效应和相对较高的加工效率等优点成为制造微细零件的有效技术,但其精度控制是制约其工业化应用的关键问题。从目前的理论和工业实践来看,传统的侧面绝缘扁平刀尖由于电场的分散分布,经常会在出入口处产生钟形轮廓,在工件的上下表面产生粗糙的表面,并产生过大的径向过切。为了提高加工精度,本文提出了一种新型的微小孔电磁加工工具结构。通过仿真和实验研究了新型刀具结构对加工精度的影响。模拟结果表明,在整个EMM过程中,与平头工具相比,缩头工具的电场分布越来越局限于电极区。通过实验验证了回缩刀尖的优越性,并研究了回缩刀尖深度对加工精度的影响。通过测量深度平均径向过切(DAROC)、入口轮廓、出口轮廓和进出口表面质量等关键指标来评价加工精度。实验结果表明,采用尖端缩进刀具可以成功地加工出进出口轮廓锋利、表面光滑、磨损量小的高质量微孔,其最佳缩尖深度为71μm。
Electrochemical micromachining (EMM) is becoming an effective technology to manufacture microparts due to its multiple advantages of almost no tool wear, almost forceless machining, no heat effect and relatively high removal rate, etc. However, accuracy controlling is the key issue which limits the industrial application of EMM. From the current theory and industrial practice, traditional side-insulated flat tip tool often causes bell-mouth profile at entrance and exit, rough surface on the top and bottom of workpiece, and excess radial overcut due to the dispersed distribution of electrical field. To improve the machining accuracy, a novel tool structure with retracted electrode tip is proposed for EMM of microhole in the present work. The effect of the novel tool structure on machining accuracy was studied with both simulation and experiments. Simulation results show that electrical field distribution with retracted tip tool is increasingly confined to the electrode region compared to the flat tip tool throughout the EMM process. Experiments were carried out to verify the advantages of the retracted tip tool and investigate the effect of tip retracted depth on machining accuracy. The critical criterions, including depth average radial overcut (DAROC), entrance profile, exit profile, and surface quality at the entrance and exit were measured to evaluate the machining accuracy. The experimental results show that high-quality microhole with sharp entrance and exit profile, smooth surface, and small DAROC can be successfully manufactured using a retracted tip tool with the optimum tip retracted depth of 71 μm.
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