In situ investigation of initial stage growth of anodic ZrO2 nanotubes by spectroscopic ellipsometry

In situ investigation of initial stage growth of anodic ZrO2 nanotubes by spectroscopic ellipsometry
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利用光谱椭圆光度法原位研究阳极 ZrO2 纳米管的初始生长阶段

DOI:
10.1016/j.elecom.2014.02.004
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发表时间:
2014-05
影响因子:
5.4
通讯作者:
Zhang Shengtao
Zhang Shengtao
中科院分区:
工程技术3区
文献类型:
--
作者:
He Yuling;Xu Jing;Li Nianbing;Zhang Shengtao

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本文首次采用高灵敏度椭偏光谱(SE)原位监测阳极氧化zro2纳米管在含F -无机电解质中阳极氧化前80 s的生长情况。采用适当的模型对椭偏光谱进行反卷积,得到了阳极氧化zro2膜特征参数的演变过程。在阳极氧化初期,可以明显区分出致密阻挡层的形成、孔隙的形成、孔隙向纳米管的演化和纳米管的稳定生长四个连续阶段;甚至第三阶段在他们的曲线上也看不出来,很可能被忽略。阳极氧化zro2膜的生长动力学主要依赖于多孔层的生长动力学,服从线性生长动力学,生长速率为25.6 nm/s。
The highly sensitive spectroscopic ellipsometry (SE) was first employed to in situ monitor the growth of anodic ZrO2nanotubes in F−-containing inorganic electrolyte within the first 80 s anodization. The evolution of the characteristic parameters of anodic ZrO2film upon anodization was obtained by deconvoluting the ellipsometric spectra with appropriate models. Four successive phases, namely, formation of compact barrier layer, formation of pores, pore evolution to nanotubes and the nanotube steady-growth, were clearly distinguished during the initial stage of anodization; even the third phase was indiscernible from thei–tcurve and likely to be ignored. The growth dynamics of the anodic ZrO2film was mainly dependent on that of the porous layer, obeying the linear growth kinetics with a rate of 25.6 nm/s.
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