Development of Piezo-Driven Compliant Bridge Mechanisms: General Analytical Equations and Optimization of Displacement Amplification.

Development of Piezo-Driven Compliant Bridge Mechanisms: General Analytical Equations and Optimization of Displacement Amplification.
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DOI:
10.3390/mi8080238
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发表时间:
2017-08-03
期刊:
影响因子:
3.4
通讯作者:
Wang Y
Wang Y
中科院分区:
工程技术3区
文献类型:
--
作者:
Wei H;Shirinzadeh B;Li W;Clark L;Pinskier J;Wang Y

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顺从桥机构经常被用来将压电致动器的微米级运动缩放到适合所需应用的水平。之前已经专门为桥机构的两种配置开发了解析方程:平行型和菱形型。基于弹性梁理论,提出了一般配置下柔顺桥机构的运动学分析。给出了输入位移、输出位移、位移放大、输入刚度、输出刚度和应力的一般方程。使用已建立的方程,优化了压电驱动的柔性桥机构,以最大化位移放大。使用计算有限元分析和实验验证了所提出的方程。最后,与先前研究的比较进一步验证了所提出模型的通用性和准确性。新分析方法的公式简化且高效,有助于实现纳米定位系统顺应桥机构的充分估计和优化。
Compliant bridge mechanisms are frequently utilized to scale micrometer order motions of piezoelectric actuators to levels suitable for desired applications. Analytical equations have previously been specifically developed for two configurations of bridge mechanisms: parallel and rhombic type. Based on elastic beam theory, a kinematic analysis of compliant bridge mechanisms in general configurations is presented. General equations of input displacement, output displacement, displacement amplification, input stiffness, output stiffness and stress are presented. Using the established equations, a piezo-driven compliant bridge mechanism has been optimized to maximize displacement amplification. The presented equations were verified using both computational finite element analysis and through experimentation. Finally, comparison with previous studies further validates the versatility and accuracy of the proposed models. The formulations of the new analytical method are simplified and efficient, which help to achieve sufficient estimation and optimization of compliant bridge mechanisms for nano-positioning systems.
一种新型粘滑式压电促动器的设计与实验研究
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