Design and Experimental Research of a Novel Stick-Slip Type Piezoelectric Actuator

Design and Experimental Research of a Novel Stick-Slip Type Piezoelectric Actuator
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一种新型粘滑式压电促动器的设计与实验研究

DOI:
10.3390/mi8050150
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发表时间:
2017-05-08
期刊:
影响因子:
3.4
通讯作者:
Wu D
Wu D
中科院分区:
工程技术3区
文献类型:
--
作者:
Zhou M;Fan Z;Ma Z;Zhao H;Guo Y;Hong K;Li Y;Liu H;Wu D

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在本文中呈现基于粘性原理的线性压力执行器,并在本文中进行测试。 Acks说明了线性执行器的结构和运动原理,并采用了有限的参数研究。最终,进行了0.29μm,进行了振动测试以获得执行器的第一个固有频率,并进行了原位观察以研究执行器的棒状滑移工作条件。
A linear piezoelectric actuator based on the stick-slip principle is presented and tested in this paper. With the help of changeable vertical preload force flexure hinge, the designed linear actuator can achieve both large travel stick-slip motion and high-resolution stepping displacement. The developed actuator mainly consists of a bridge-type flexure hinge mechanism, a compound parallelogram flexure hinge mechanism, and two piezoelectric stacks. The mechanical structure and motion principle of the linear actuator were illustrated, and the finite element method (FEM) is adopted. An optimal parametric study of the flexure hinge is performed by a finite element analysis-based response surface methodology. In order to investigate the actuator’s working performance, a prototype was manufactured and a series of experiments were carried out. The results indicate that the maximum motion speed is about 3.27 mm/s and the minimum stepping displacement is 0.29 μm. Finally, a vibration test was carried out to obtain the first natural frequency of the actuator, and an in situ observation was conducted to investigate actuator’s stick-slip working condition. The experimental results confirm the feasibility of the proposed actuator, and the motion speed and displacement are both improved compared with the traditional stick-slip motion actuator.
具有磁滞非线性的压电驱动纳米定位台高速光栅扫描的奇次谐波重复控制
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